公开(公告)号：US20130069449A1

公开(公告)日：2013-03-21

申请号：US13621669

申请日：2012-09-17

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

IPC: H02K15/06 ,  H02K41/02

CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。

公开(公告)号：US08330307B2

公开(公告)日：2012-12-11

申请号：US12654688

申请日：2009-12-29

Applicant: Keiji Nagasaka

Inventor： Keiji Nagasaka

IPC: H02K41/02

CPC classification number: H02K41/03 ,  H02K9/18 ,  H02K9/20 ,  H02K9/22 ,  H02K2201/18

Abstract: A linear motor including permanent magnets fixed on an elongate yoke such that polarities of the permanent magnets alternately change, and an armature having cores and coils wound on the respective cores, wherein each row of the permanent magnets and the armature are moved relative to each other along a straight line by application of an electric current to the coils, each core extending in a first direction perpendicular to the permanent magnet row, the cores being arranged in a second direction perpendicular to the first direction and disposed on the cores such that the coils on the cores adjacent to each other are arranged in a zigzag pattern and spaced apart from each other in the first direction, with a gap left therebetween, wherein the armature includes a heat pipe having opposite end portions one of which is inserted in the gap and the other of which extends outwardly of the gap, and fins fixed to the other end portion of the heat pipe.

Abstract translation: 一种线性电动机，其包括固定在细长磁轭上的永磁体，使得永磁体的极性交替变化，以及具有卷绕在各个芯上的磁芯和线圈的电枢，其中每排永磁体和电枢相对于彼此移动 通过向线圈施加电流沿着直线，每个芯沿垂直于永磁体列的第一方向延伸，芯沿垂直于第一方向的第二方向布置，并且设置在芯上，使得线圈 在彼此相邻的芯上排列成锯齿形图案并且在第一方向上彼此间隔开，间隙留在其间，其中电枢包括具有相对端部的热管，其中一个端部插入间隙中， 另一个从间隙向外延伸，翅片固定在热管的另一端部。

公开(公告)号：US08243147B2

公开(公告)日：2012-08-14

申请号：US12835831

申请日：2010-07-14

Applicant: Seung-hwan Lee

Inventor： Seung-hwan Lee

IPC: H04N9/04 ,  H04N5/228

CPC classification number: G03B5/00 ,  H02K41/0354 ,  H02K2201/18

Abstract: A handshake correction apparatus is provided that comprises: a correction lens that is driven in a plane defined by a first axis and a second axis that are each independent; a pair of first magnets disposed at opposite sides of the correction lens for providing a driving force in a first axis direction; at least one second magnet disposed on at least one side of the correction lens for providing a driving force in a second axis direction; and driving coils disposed to face the first and second magnets for exerting electromagnetic interaction therebetween. In the handshake correction apparatus, a rotation of the correction lens is minimized to improve a controlling characteristic.

Abstract translation: 提供了一种握手校正装置，包括：校正透镜，其在由第一轴和第二轴限定的平面中被驱动，所述第一轴和第二轴各自独立; 设置在所述校正透镜的相对侧的一对第一磁体，用于在第一轴线方向上提供驱动力; 设置在所述校正透镜的至少一侧的至少一个第二磁体，用于在第二轴线方向上提供驱动力; 以及设置成面对第一和第二磁体的驱动线圈，用于在它们之间施加电磁相互作用。 在握手校正装置中，校正透镜的旋转被最小化以改善控制特性。

公开(公告)号：US20120139469A1

公开(公告)日：2012-06-07

申请号：US13270151

申请日：2011-10-10

Applicant: Ronald E. Pelrine ,  Gregory K. Myers ,  Annjoe Wong-Foy ,  James A. Herson ,  Thomas P. Low

Inventor： Ronald E. Pelrine ,  Gregory K. Myers ,  Annjoe Wong-Foy ,  James A. Herson ,  Thomas P. Low

IPC: H02P8/22 ,  H02K41/03

CPC classification number: H02K41/031 ,  H02K41/03 ,  H02K2201/18 ,  H02N15/00

Abstract: A method of propelling a magnetic manipulator above a circuit substrate includes arranging a magnetic manipulator on a diamagnetic layer on a surface of the circuit substrate, generating drive signals using a controller, and applying the drive signals to at least two conductive traces arranged in the circuit substrate below the diamagnetic layer. A circuit substrate to control movement of a magnetic manipulator has a diamagnetic layer on a surface of the substrate, and conductive traces arranged under the diamagnetic layer, the conductive traces arranged in a parallel line pattern in at least two separate layers.

Abstract translation: 一种将电磁操纵器推进电路基板之上的方法包括在电路基板的表面上的抗磁层上布置磁性操纵器，使用控制器产生驱动信号，并将驱动信号施加到布置在电路中的至少两个导电迹线 底物低于抗磁层。 用于控制磁性操纵器的运动的电路基板在基板的表面上具有抗磁层，布置在抗磁层下方的导电迹线，导电迹线以至少两个分开的层布置成平行线图案。

公开(公告)号：US20120119592A1

公开(公告)日：2012-05-17

申请号：US13172396

申请日：2011-06-29

Applicant: Kyung Min Lee

Inventor： Kyung Min Lee

IPC: H02K41/02

CPC classification number: H02K41/031 ,  H02K1/17 ,  H02K16/00 ,  H02K21/14 ,  H02K2201/18

Abstract: An actuator is provided, which includes a main shaft having a first shaft portion for generating a magnetic field in a linear direction and a second shaft portion for generating a magnetic field in a rotational direction, and a coil wound around an outer peripheral surface of the main shaft. The actuator performs both a rotational driving function and a straight driving function via a single unit to improve the positional accuracy and provide spatial efficiency, thereby improving the merchantable quality of the actuator.

Abstract translation: 提供了一种致动器，其包括主轴，该主轴具有用于沿直线方向产生磁场的第一轴部分和用于在旋转方向上产生磁场的第二轴部分，以及缠绕在所述旋转方向的外周表面上的线圈 主轴。 致动器通过单个单元执行旋转驱动功能和直线驱动功能，以提高位置精度并提供空间效率，从而提高致动器的可商售质量。

公开(公告)号：US08164294B2

公开(公告)日：2012-04-24

申请号：US12296096

申请日：2007-03-28

Applicant: Olivier Chételat

Inventor： Olivier Chételat

IPC: H02K41/03 ,  G01C19/30 ,  B64G1/28

CPC classification number: G01C19/30 ,  B64G1/28 ,  H02K16/00 ,  H02K21/12 ,  H02K41/031 ,  H02K2201/03 ,  H02K2201/18 ,  Y10T74/1254

Abstract: In general, one aspect of the subject matter described in this specification features a torquer apparatus that includes a rotor with magnetic poles such that, when radially projected on a concentric octahedron, the same symmetrical pattern is obtained on all faces of the octahedron, the polarity of the poles projected on two adjacent faces of the octahedron being opposite. A stator with at least twenty poles magnetized with coils and such that, when radially projected on a concentric icosahedron, the same symmetrical pattern is obtained on all faces of the icosahedron, the stator being-in nominal position-concentric with the rotor. Real-time measurements, or equivalent information, of the position of the rotor with respect to the stator, and real-time measurements, or equivalent information, of exported torque from the stator, or of the orientation of the rotor with respect to the stator can be obtained. A controller for controlling the current in the coils based on the measurements, or the equivalent information, such that the rotor is magnetically held in the nominal position, and that the desired torque is exported.

Abstract translation: 通常，本说明书中描述的主题的一个方面特征在于一种具有磁极的转子的矫形装置，使得当径向地突出在同心八面体上时，在八面体的所有面上获得相同的对称图案，极性 投射在八面体的两个相邻面上的磁极相反。 具有至少二十个磁极的线圈被磁化并且当径向地突出在同心二十面体上时，在二十面体的所有面上获得相同的对称图案，定子处于与转子同心的标称位置。 转子相对于定子的位置的实时测量或等效信息，以及来自定子的输出扭矩的实时测量或等效信息，或转子相对于定子的取向的实时测量或等效信息 可以获得。 控制器，用于基于测量或等效信息来控制线圈中的电流，使得转子被磁力地保持在标称位置，并且输出期望的扭矩。

公开(公告)号：US20120043832A1

公开(公告)日：2012-02-23

申请号：US12860809

申请日：2010-08-20

Applicant: Edward A. NEFF ,  Toan M. Vu

Inventor： Edward A. NEFF ,  Toan M. Vu

IPC: H02K41/02

CPC classification number: H02K41/0356 ,  H02K11/21 ,  H02K16/00 ,  H02K21/14 ,  H02K2201/18

Abstract: Methods and apparatus for a compact linear actuator having an improved rotary mechanism are disclosed herein. In one embodiment, the linear actuator comprises a spline bearing for guiding the shaft of the actuator as it is linearly actuated. A rotor positioned around the spline bearing rotatably engages the spline bearing when magnetically actuated by a surrounding stator. A rotational lock connected to the piston assembly may be used to prevent the piston assembly from rotating during operation. Optionally, a rotary scale may be attached to the spline bearing in order to indicate how far the shaft has rotated. Since the shaft does not bear the mass of the rotary mechanism, linear performance of the actuator is substantially improved.

Abstract translation: 本文公开了具有改进的旋转机构的紧凑型线性致动器的方法和装置。 在一个实施例中，线性致动器包括花键轴承，用于在其被线性致动时引导致动器的轴。 定位在花键轴承周围的转子可旋转地接合花键轴承，当由周围定子磁致动时。 连接到活塞组件的旋转锁可以用于防止活塞组件在操作期间旋转。 可选地，旋转刻度可以附接到花键轴承，以便指示轴已经旋转多远。 由于轴不承受旋转机构的质量，致动器的线性性能显着提高。

公开(公告)号：US20110291494A1

公开(公告)日：2011-12-01

申请号：US13095446

申请日：2011-04-27

Applicant: Eiji IDA ,  Norimitsu Kitade

Inventor： Eiji IDA ,  Norimitsu Kitade

IPC: H02K41/02

CPC classification number: H02K41/031 ,  H02K5/20 ,  H02K9/02 ,  H02K9/22 ,  H02K11/215 ,  H02K11/22 ,  H02K16/00 ,  H02K2201/18

Abstract: A three-dimensional sliding system has an X-table and a Z-table, which are actuated to travel independently of each other. The sliding system is simple in construction and adapted to actuate a movable table with less takt time. A bed has a first flat zone extending in a horizontal direction to carry the X-table thereon, a second flat zone extending in a vertical direction to carry the Z-table thereon, and a third flat zone where the first flat zone merges with the second flat zone. The movable table is laid over the third flat zone and linked with the X-table and the Z-table through linear motion guide units, respectively. Actuations of an X-linear motor in an X-direction and actuation of a Z-linear motor in a Z-direction cause the movable table to move into a targeted position with high precision in the X-direction and in the Z-direction.

Abstract translation: 三维滑动系统具有X台和Z台，其被致动以彼此独立地行进。 滑动系统结构简单，适用于启动时间较短的活动台。 床具有沿水平方向延伸的第一平坦区域，以在其上承载X台，沿着垂直方向延伸的第二平坦区域，以在其上承载Z台;以及第三平坦区域，其中第一平坦区域与 第二平坦区。 可移动台被放置在第三平坦区域上，分别通过直线运动导向单元与X台和Z台连接。 X线性电动机沿X方向的动作和Z方向的Z方向的电动机的动作使得活动台在X方向和Z方向上以高精度移动到目标位置。

公开(公告)号：US20110254385A1

公开(公告)日：2011-10-20

申请号：US13041445

申请日：2011-03-07

Applicant: Shogo Makino ,  Toru Shikayama

Inventor： Shogo Makino ,  Toru Shikayama

IPC: H02K41/02

CPC classification number: H02K41/03 ,  H02K16/00 ,  H02K21/14 ,  H02K2201/18

Abstract: A direct acting rotation actuator includes a motor unit, an output shaft, a detector unit, and a bearing portion. The motor unit includes a field magnet portion which includes a permanent magnet or a core tooth, a first armature winding which generates a rotation magnetic field in the rotation direction, and a second armature winding which generates a traveling magnetic field in the direct acting direction. The output shaft is attached to the field magnet portion of the motor unit. The detector unit includes a direct acting detector and a rotation detector respectively detecting a position in the direct acting direction and an angle in the rotation direction of the output shaft. The bearing portion includes a direct acting bearing and a rotation bearing respectively supporting the output shaft in the direct acting direction and the rotation direction. The motor unit is disposed on an anti-load side of the output shaft, and the detector unit is disposed on a load side of the output shaft.

Abstract translation: 直动式旋转致动器包括马达单元，输出轴，检测器单元和轴承部分。 马达单元包括具有永久磁铁或磁芯齿的磁场部分，在旋转方向上产生旋转磁场的第一电枢绕组，以及在直接作用方向上产生行进磁场的第二电枢绕组。 输出轴连接到电动机单元的磁场部分。 检测器单元包括直接作用检测器和旋转检测器，分别检测直接作用方向上的位置和输出轴的旋转方向上的角度。 轴承部分包括直接作用轴承和分别在直接作用方向和旋转方向上支撑输出轴的旋转轴承。 马达单元设置在输出轴的反负载侧，检测器单元设置在输出轴的负载侧。

公开(公告)号：US20110234343A1

公开(公告)日：2011-09-29

申请号：US13001752

申请日：2008-09-29

Applicant: Jeong Woo Jeon ,  Hyun Seok Oh ,  Sung II Chung ,  Yeon Ho Jeong ,  Do Hyun Kang ,  S.A. Nikiforov ,  Mitica Caraiani

Inventor： Jeong Woo Jeon ,  Hyun Seok Oh ,  Sung II Chung ,  Yeon Ho Jeong ,  Do Hyun Kang ,  S.A. Nikiforov ,  Mitica Caraiani

IPC: H01F7/20

CPC classification number: G03F7/70825 ,  G03F7/24 ,  G03F7/703 ,  G03F7/707 ,  G03F7/70725 ,  G03F7/70791 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70858 ,  H02K7/09 ,  H02K16/00 ,  H02K21/12 ,  H02K41/031 ,  H02K2201/15 ,  H02K2201/18 ,  H02N15/00

Abstract: The present invention provides a cylindrical magnetic levitation stage which includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on a large-area semiconductor substrate or display panel substrate, a cylindrical substrate, a combination of a first permanent magnet array and a first coil array and a combination of a first permanent magnet array and a first coil array, which are coupled to the cylindrical substrate, so that levitation, axial translation and rotation of the cylindrical substrate can be made finely through the control of a magnetic force generated by the interaction between a magnetic field generated by electric current applied to the coil arrays and a magnetic field generated from the permanent magnet arrays corresponding to the coil arrays.

Abstract translation: 本发明提供一种圆柱形磁悬浮台，其包括用于在大面积半导体基板或显示面板基板上形成各种任意形状的微图形的圆柱形基板，圆柱形基板，第一永久磁铁阵列和 第一线圈阵列和第一永磁体阵列和第一线圈阵列的组合，其耦合到圆柱形基板，从而可以通过控制产生的磁力来使得圆柱形基板的悬浮，轴向平移和旋转精细化 通过由施加到线圈阵列的电流产生的磁场与对应于线圈阵列的永磁体阵列产生的磁场之间的相互作用。