Abstract:
A semiconductor device with a strain layer and a method of fabricating the semiconductor device with a strain layer that can reduce a loading effect are provided. By arranging active dummies and gate dummies not to overlap each other, the area of active dummy on which a strain layer dummy will be formed can be secured, thereby reducing the loading effect.
Abstract:
The present invention provides integrated circuit devices that include a semiconductor substrate having a semiconductor region of first conductivity type therein extending adjacent the surface of the substrate. The device further includes an electrically insulating layer with a contact hole in it that exposes the semiconductor region of first conductivity type on the surface of the semiconductor substrate. The device still further includes a poly-Si1-xGex conductive plug of first conductivity type that extends in the contact hole and is electrically connected to the semiconductor region of first conductivity type is provided. Related methods of fabricating integrated circuit devices are also provided.
Abstract:
Methods of forming an electronic device include providing a fist electrode, providing a dielectric oxide layer on the first electrode, and providing a second electrode on the dielectric oxide layer so that the dielectric oxide layer is between the first and second electrodes. More particularly, a first portion of the dielectric oxide layer adjacent the first electrode can have a first density of titanium, and a second portion of the dielectric oxide layer opposite the first electrode can have a second density of titanium different than the first density. Related structures are also discussed.
Abstract:
A method of forming a microelectronic device includes the step of forming an impurity doped amorphous silicon layer on a microelectronic substrate using plasma-enhanced chemical vapor deposition. The impurity doped amorphous silicon layer is patterned so that portions of the microelectronic substrate are exposed adjacent the patterned amorphous silicon layer. A hemispherical grained silicon layer is then formed on the patterned amorphous silicon layer. Moreover, the step of forming the impurity doped amorphous silicon layer can be performed at a temperature of 400.degree. C. or less.
Abstract:
Disclosed is a handshake correction apparatus of a photographing apparatus. The handshake correction apparatus includes a lens support plate that supports a correction lens and operates in a direction perpendicular to an optical axis; a base that supports the lens support plate to be movable; and magnets and driving coils which are assembled on the lens support plate and the base to face each other, wherein the magnets are tight-fitted in assembly grooves of the lens support plate or the base, and wherein one or more protrusions that protrude from internal walls of the assembly grooves toward the magnets and elastically press the magnets are formed in the assembly grooves. Control performance of a correction operation of the handshake correction apparatus may be improved by ensuring alignment between assembly structures of assembly parts including magnets and yokes.
Abstract:
An optical system includes a housing, a lens assembly, and a piezoelectric actuator assembly. The lens assembly includes a lens unit having at least one lens, and a lens frame that supports the lens unit and moves in the housing. The piezoelectric actuator assembly includes a base plate coupled to the housing, an elastic plate coupled to the base plate and including a protrusion protruding from a first surface of the elastic plate, a piezoelectric element coupled to a second surface of the elastic plate wherein the piezoelectric element vibrates when receiving electricity and transmits the vibration to the elastic plate, and a moving portion that supports the lens frame. The moving portion has a first end supported by the protrusion of the elastic plate and a second end slidably coupled to the base plate.
Abstract:
A method of forming a flash memory device can include forming a tunneling oxide film on a semiconductor substrate, forming a charge storing layer on the tunneling oxide film, forming a first blocking oxide film on the charge storing layer at a first temperature, forming a second blocking oxide film on the first blocking oxide film at a second temperature higher than the first temperature, and forming a gate electrode on the second blocking oxide film.
Abstract:
Methods of forming a capacitor of a semiconductor device can include forming a lower electrode of a capacitor on a semiconductor substrate and forming a dielectric material layer of Ba(Ti1-xSnx)O3 (BTS) or Ba(Ti1-xZrx)O3 (BTZ) on the lower electrode. An amorphous layer can be formed on the dielectric material layer. An upper electrode of the capacitor can be formed on the amorphous layer.
Abstract translation:形成半导体器件的电容器的方法可以包括在半导体衬底上形成电容器的下电极并形成Ba(Ti 1-x Sn Sn x x)的介电材料层 3)(3)(BTS)或Ba(Ti 1-x Zr x x)O 3(BTZ) 在下电极上。 可以在介电材料层上形成非晶层。 可以在非晶层上形成电容器的上电极。
Abstract:
A method of manufacturing a bipolar device including pre-treatment using germane gas and a bipolar device manufactured by the same. The method includes forming a single crystalline silicon layer for a base region on a collector region; and forming a polysilicon layer for an emitter region thereon. Here, before the polysilicon layer is formed, the single crystalline silicon layer is pre-treated using germane gas. Thus, an oxide layer is removed from the single crystalline silicon layer, and a germanium layer is formed on the single crystalline silicon layer, thus preventing Si-rearrangement.
Abstract:
In a metal-oxide semiconductor (MOS) transistor with an elevated source/drain structure and in a method of fabricating the MOS transistor with the elevated source/drain structure using a selective epitaxy growth (SEG) process, a source/drain extension junction is formed after an epi-layer is formed, thereby preventing degradation of the source/drain junction region. In addition, the source/drain extension junction is partially overlapped by a lower portion of the gate layer, since two gate spacers are formed and two elevated source/drain layers are formed in accordance with the SEG process. This mitigates the short channel effect and reduces sheet resistance in the source/drain layers and the gate layer.