Method of embedding material in a glass substrate
    83.
    发明授权
    Method of embedding material in a glass substrate 有权
    将材料嵌入玻璃基板的方法

    公开(公告)号:US08707734B2

    公开(公告)日:2014-04-29

    申请号:US12581695

    申请日:2009-10-19

    Abstract: A method of embedding material in a glass substrate is provided. The method includes providing a glass composition and a mold substrate having a patterned surface defining a recess therein. The mold substrate is formed from a material having a higher reflow temperature than the glass composition. A surface wettability of the patterned surface is increased relative to the glass composition. At least a portion of the glass composition is flowed into the recess defined by the patterned surface of the mold substrate, followed by solidifying the glass composition to form a solidified glass layer. Material is removed from the solidified glass layer until a portion of the underlying patterned surface of the mold substrate is exposed with at least a portion of the mold substrate embedded in the solidified glass layer to thereby form the glass substrate having the material embedded therein.

    Abstract translation: 提供了将材料嵌入玻璃基板中的方法。 该方法包括提供玻璃组合物和具有在其中限定凹部的图案化表面的模具基底。 模具基材由具有比玻璃组合物更高的回流温度的材料形成。 图案化表面的表面润湿性相对于玻璃组合物增加。 玻璃组合物的至少一部分流入由模具基材的图案化表面限定的凹部中,然后固化玻璃组合物以形成固化的玻璃层。 将材料从凝固的玻璃层移除,直到模具基板的下面的图案化表面的一部分暴露于模具基底的至少一部分嵌入固化的玻璃层中,从而形成具有嵌入其中的材料的玻璃基板。

    SYSTEM AND METHOD FOR MINIATURIZATION OF SYNTHETIC JETS

    公开(公告)号:US20130230934A1

    公开(公告)日:2013-09-05

    申请号:US13862616

    申请日:2013-04-15

    Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

    Integrated circuit cooling device
    85.
    发明授权
    Integrated circuit cooling device 有权
    集成电路冷却装置

    公开(公告)号:US08164183B2

    公开(公告)日:2012-04-24

    申请号:US10580324

    申请日:2004-11-12

    Inventor: Guillaume Bouche

    Abstract: A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

    Abstract translation: 一种泵,具有:形成在绝缘基板内部的空腔,所述基板的上部位于具有边缘的所述空腔附近; 导电层,覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜,放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层,由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线,所述曝气线经由所述导电层中的开口而进入所述空腔, 用于在导电层和膜之间施加电压的端子。

    Method of Embedding Material In A Glass Substrate
    86.
    发明申请
    Method of Embedding Material In A Glass Substrate 有权
    在玻璃基板中嵌入材料的方法

    公开(公告)号:US20110091687A1

    公开(公告)日:2011-04-21

    申请号:US12581695

    申请日:2009-10-19

    Abstract: A method of embedding material in a glass substrate is provided. The method includes providing a glass composition and a mold substrate having a patterned surface defining a recess therein. The mold substrate is formed from a material having a higher reflow temperature than the glass composition. A surface wettability of the patterned surface is increased relative to the glass composition. At least a portion of the glass composition is flowed into the recess defined by the patterned surface of the mold substrate, followed by solidifying the glass composition to form a solidified glass layer. Material is removed from the solidified glass layer until a portion of the underlying patterned surface of the mold substrate is exposed with at least a portion of the mold substrate embedded in the solidified glass layer to thereby form the glass substrate having the material embedded therein.

    Abstract translation: 提供了将材料嵌入玻璃基板中的方法。 该方法包括提供玻璃组合物和具有在其中限定凹部的图案化表面的模具基底。 模具基材由具有比玻璃组合物更高的回流温度的材料形成。 图案化表面的表面润湿性相对于玻璃组合物增加。 玻璃组合物的至少一部分流入由模具基材的图案化表面限定的凹部中,然后固化玻璃组合物以形成固化的玻璃层。 将材料从凝固的玻璃层移除,直到模具基板的下面的图案化表面的一部分暴露于模具基底的至少一部分嵌入固化的玻璃层中,从而形成具有嵌入其中的材料的玻璃基板。

    Radially Staged Microscale Turbomolecular Pump
    88.
    发明申请
    Radially Staged Microscale Turbomolecular Pump 审中-公开
    径向分级微尺度涡轮分子泵

    公开(公告)号:US20090081022A1

    公开(公告)日:2009-03-26

    申请号:US11859682

    申请日:2007-09-21

    Applicant: Wei Yang

    Inventor: Wei Yang

    Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.

    Abstract translation: 一种径向涡轮分子真空泵,包括由包括单片制造的微型叶片的硅转子表面制成的转子,以及由硅定子表面制成的定子,其包括相应的单片制造的凹槽。 微型叶片和槽布置在多个环中,并且转子和定子盘被放置在邻近处,产生相互指向的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。

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