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公开(公告)号:US20140322489A1
公开(公告)日:2014-10-30
申请号:US14218872
申请日:2014-03-18
Applicant: California Institute of Technology
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: F16K13/00
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract translation: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US08846183B2
公开(公告)日:2014-09-30
申请号:US13278061
申请日:2011-10-20
Applicant: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: B32B3/00 , F16C1/06 , F16K1/00 , F16K7/00 , F16K31/145 , B29C65/00 , B29C45/14 , B01L3/00 , C12Q1/68 , B81C1/00 , F04B43/04 , F15C5/00 , B01L9/00 , F16K99/00 , B32B37/10 , B01L7/00
CPC classification number: B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US08707734B2
公开(公告)日:2014-04-29
申请号:US12581695
申请日:2009-10-19
Applicant: Razi-ul Haque , Kensall Wise
Inventor: Razi-ul Haque , Kensall Wise
IPC: C03C27/04
CPC classification number: C03C19/00 , B81B2201/036 , B81B2201/058 , B81C1/00095 , F04B19/006 , Y10T428/24479
Abstract: A method of embedding material in a glass substrate is provided. The method includes providing a glass composition and a mold substrate having a patterned surface defining a recess therein. The mold substrate is formed from a material having a higher reflow temperature than the glass composition. A surface wettability of the patterned surface is increased relative to the glass composition. At least a portion of the glass composition is flowed into the recess defined by the patterned surface of the mold substrate, followed by solidifying the glass composition to form a solidified glass layer. Material is removed from the solidified glass layer until a portion of the underlying patterned surface of the mold substrate is exposed with at least a portion of the mold substrate embedded in the solidified glass layer to thereby form the glass substrate having the material embedded therein.
Abstract translation: 提供了将材料嵌入玻璃基板中的方法。 该方法包括提供玻璃组合物和具有在其中限定凹部的图案化表面的模具基底。 模具基材由具有比玻璃组合物更高的回流温度的材料形成。 图案化表面的表面润湿性相对于玻璃组合物增加。 玻璃组合物的至少一部分流入由模具基材的图案化表面限定的凹部中,然后固化玻璃组合物以形成固化的玻璃层。 将材料从凝固的玻璃层移除,直到模具基板的下面的图案化表面的一部分暴露于模具基底的至少一部分嵌入固化的玻璃层中,从而形成具有嵌入其中的材料的玻璃基板。
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公开(公告)号:US20130230934A1
公开(公告)日:2013-09-05
申请号:US13862616
申请日:2013-04-15
Applicant: GENERAL ELECTRIC COMPANY
Inventor: Mehmet Arik , Stanton Earl Weaver
IPC: B81C1/00
CPC classification number: B81B7/0093 , B81B2201/036 , B81B2201/058 , B81B2203/0127 , B81C1/00158 , F04B45/047 , H01L23/467 , H01L41/0973 , H01L2924/0002 , H01L2924/00
Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
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公开(公告)号:US08164183B2
公开(公告)日:2012-04-24
申请号:US10580324
申请日:2004-11-12
Applicant: Guillaume Bouche
Inventor: Guillaume Bouche
IPC: H01L23/34
CPC classification number: F04B43/043 , B81B7/0093 , B81B2201/036 , B81B2203/0127 , B81B2203/0315 , H01L23/473 , H01L2924/0002 , H01L2924/00
Abstract: A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.
Abstract translation: 一种泵,具有:形成在绝缘基板内部的空腔,所述基板的上部位于具有边缘的所述空腔附近; 导电层,覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜,放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层,由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线,所述曝气线经由所述导电层中的开口而进入所述空腔, 用于在导电层和膜之间施加电压的端子。
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公开(公告)号:US20110091687A1
公开(公告)日:2011-04-21
申请号:US12581695
申请日:2009-10-19
Applicant: Razi-ul Haque , Kensall Wise
Inventor: Razi-ul Haque , Kensall Wise
CPC classification number: C03C19/00 , B81B2201/036 , B81B2201/058 , B81C1/00095 , F04B19/006 , Y10T428/24479
Abstract: A method of embedding material in a glass substrate is provided. The method includes providing a glass composition and a mold substrate having a patterned surface defining a recess therein. The mold substrate is formed from a material having a higher reflow temperature than the glass composition. A surface wettability of the patterned surface is increased relative to the glass composition. At least a portion of the glass composition is flowed into the recess defined by the patterned surface of the mold substrate, followed by solidifying the glass composition to form a solidified glass layer. Material is removed from the solidified glass layer until a portion of the underlying patterned surface of the mold substrate is exposed with at least a portion of the mold substrate embedded in the solidified glass layer to thereby form the glass substrate having the material embedded therein.
Abstract translation: 提供了将材料嵌入玻璃基板中的方法。 该方法包括提供玻璃组合物和具有在其中限定凹部的图案化表面的模具基底。 模具基材由具有比玻璃组合物更高的回流温度的材料形成。 图案化表面的表面润湿性相对于玻璃组合物增加。 玻璃组合物的至少一部分流入由模具基材的图案化表面限定的凹部中,然后固化玻璃组合物以形成固化的玻璃层。 将材料从凝固的玻璃层移除,直到模具基板的下面的图案化表面的一部分暴露于模具基底的至少一部分嵌入固化的玻璃层中,从而形成具有嵌入其中的材料的玻璃基板。
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公开(公告)号:US20100187105A1
公开(公告)日:2010-07-29
申请号:US12556373
申请日:2009-09-09
Applicant: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
CPC classification number: B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US20090081022A1
公开(公告)日:2009-03-26
申请号:US11859682
申请日:2007-09-21
Applicant: Wei Yang
Inventor: Wei Yang
CPC classification number: F04D17/168 , B81B3/0021 , B81B2201/034 , B81B2201/036 , B81B2203/056 , F04D17/127
Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.
Abstract translation: 一种径向涡轮分子真空泵,包括由包括单片制造的微型叶片的硅转子表面制成的转子,以及由硅定子表面制成的定子,其包括相应的单片制造的凹槽。 微型叶片和槽布置在多个环中,并且转子和定子盘被放置在邻近处,产生相互指向的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。
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公开(公告)号:US20090056822A1
公开(公告)日:2009-03-05
申请号:US12248496
申请日:2008-10-09
Applicant: Lincoln C. Young , Peng Zhou
Inventor: Lincoln C. Young , Peng Zhou
IPC: F15C3/04
CPC classification number: F16K7/12 , B01F5/0683 , B01F5/0688 , B01F11/0071 , B01F13/0059 , B01F2215/0034 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2200/12 , B01L2300/0816 , B01L2300/0861 , B01L2300/0867 , B01L2300/0887 , B01L2400/0481 , B01L2400/0487 , B01L2400/06 , B01L2400/0638 , B01L2400/0655 , B01L2400/084 , B29C65/4895 , B29C66/004 , B29C66/54 , B29C66/5412 , B29C66/71 , B29K2025/00 , B29K2025/04 , B29K2033/08 , B29K2069/00 , B29K2101/12 , B29L2031/7496 , B29L2031/7506 , B29L2031/756 , B81B3/0021 , B81B2201/036 , B81B2201/054 , B81B2203/0127 , B81C1/00103 , B81C1/00158 , F04B43/028 , F04B43/043 , F04B43/06 , F15C1/08 , F16K99/0001 , F16K99/0015 , F16K99/0021 , F16K99/0034 , F16K99/0055 , F16K99/0057 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T29/49405 , Y10T137/212 , Y10T137/2202 , Y10T137/2218 , Y10T137/8593 , Y10T137/85978 , Y10T156/1002 , Y10T156/1043 , B29K2033/12 , B29K2025/06
Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
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公开(公告)号:US20080277005A1
公开(公告)日:2008-11-13
申请号:US11685654
申请日:2007-03-13
Applicant: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
IPC: F15C3/00
CPC classification number: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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