Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species
    81.
    发明授权
    Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species 有权
    使用激发氮氧物质的金属氧化物薄膜沉积的系统和方法

    公开(公告)号:US08883270B2

    公开(公告)日:2014-11-11

    申请号:US12854818

    申请日:2010-08-11

    Abstract: Systems and methods are delineated which, among other things, are for depositing a film on a substrate that is within a reaction chamber. In an exemplary method, the method may comprise applying an atomic layer deposition cycle to the substrate, wherein the cycle may comprise exposing the substrate to a precursor gas for a precursor pulse interval and then removing the precursor gas thereafter, and exposing the substrate to an oxidizer comprising an oxidant gas and a nitrogen-containing species gas for an oxidation pulse interval and then removing the oxidizer thereafter. Aspects of the present invention utilize molecular and excited nitrogen-oxygen radical/ionic species in possible further combination with oxidizers such as ozone. Embodiments of the present invention also include electronic components and systems that include devices fabricated with methods consistent with the present invention.

    Abstract translation: 描述了系统和方法,其中除了别的以外是将膜沉积在反应室内的基底上。 在示例性方法中,该方法可以包括将原子层沉积循环应用于衬底,其中该循环可以包括将衬底暴露于用于前体脉冲间隔的前体气体,然后在此之后除去前体气体,并将衬底暴露于 氧化剂,其包含氧化剂气体和用于氧化脉冲间隔的含氮物质气体,然后除去氧化剂。 本发明的方面利用分子激发的氮氧自由基/离子物质可能与氧化剂如臭氧进一步组合。 本发明的实施例还包括电子部件和系统,其包括用与本发明一致的方法制造的装置。

    POWER SUPPLY APPARATUS FOR A CAPACITIVE LOAD
    84.
    发明申请
    POWER SUPPLY APPARATUS FOR A CAPACITIVE LOAD 审中-公开
    电源负载供电装置

    公开(公告)号:US20130169397A1

    公开(公告)日:2013-07-04

    申请号:US13779586

    申请日:2013-02-27

    Inventor: Mikael Hansson

    Abstract: The invention provides a power supply apparatus for supplying electric power to a capacitive load. The apparatus has a transformer, a positive half-period driver and a negative half-period driver supplying positive and negative half-periods of voltage to the first coil. The second coil forms an electric resonance circuit and supplies electric voltage to the load. Zero crossings of the voltage supplied to the first coil are determined from a third coil on the transformer, and alternation between positive and negative half-periods of voltage supplied to the first coil is done at the zero crossings of the voltage supplied to the first coil.

    Abstract translation: 本发明提供了一种用于向电容性负载提供电力的电源装置。 该装置具有变压器,正半周期驱动器和负半周期驱动器,向第一线圈提供正半周期和负半周期的电压。 第二线圈形成电谐振电路并向负载提供电压。 提供给第一线圈的电压的零交叉由变压器上的第三线圈确定,并且在提供给第一线圈的电压的正和负半周期之间的交替在提供给第一线圈的电压的过零点处进行 。

    POWER SUPPLY APPARATUS FOR A CAPACITIVE LOAD

    公开(公告)号:US20130168230A1

    公开(公告)日:2013-07-04

    申请号:US13779645

    申请日:2013-02-27

    Inventor: Mikael Hansson

    Abstract: The invention provides a power supply apparatus for supplying electric power to a capacitive load. The apparatus has a transformer, a positive half-period driver and a negative half-period driver supplying positive and negative half-periods of voltage to the first coil. The second coil forms an electric resonance circuit and supplies electric voltage to the load. Zero crossings of the voltage supplied to the first coil are determined from a third coil on the transformer, and alternation between positive and negative half-periods of voltage supplied to the first coil is done at the zero crossings of the voltage supplied to the first coil.

    Ozone generating apparatus
    87.
    发明授权
    Ozone generating apparatus 有权
    臭氧发生装置

    公开(公告)号:US08337767B2

    公开(公告)日:2012-12-25

    申请号:US12690651

    申请日:2010-01-20

    CPC classification number: C01B13/11 C01B2201/64 C01B2201/76

    Abstract: An ozone generating apparatus having high reliability in which a glass tube can prevent from being damaged by melting a power feeding brush even if a large amount of short-circuit current flows. In an ozone generating apparatus using silent discharge, an alternating high voltage power is supplied from a power supply to a metal film formed in an inner wall of a glass tube by a power feeding brush comprising a brush shaft made of metal and a large number of metal thin wires fixed to the periphery of the brush shaft, the following equation satisfies. (D2/D1)≧1/{1+(1/20β)}, wherein ‘D1’ indicates an outer diameter of a bundle of metal thin wires, ‘D2’ indicates an outer diameter of the brush shaft and ‘β’ indicates the line density of metal thin wires on a surface of the brush shaft.

    Abstract translation: 一种具有高可靠性的臭氧发生装置,其中即使大量短路电流流动,玻璃管也可以防止熔化供电刷而损坏玻璃管。 在使用无声放电的臭氧发生装置中,通过由金属制的刷轴和大量的金属制的电力供给电刷将交流高压电力从电源供给到形成在玻璃管的内壁的金属膜 固定在刷轴周边的金属细线,满足下式。 (D2 / D1)≥1/ {1+(1/20&bgr;)},其中D1表示金属细线束的外径,D2表示刷轴的外径和bgr; 表示刷轴表面上的金属细线的线密度。

    OXIDATION TREATMENT METHOD AND OXIDATION TREATMENT APPARATUS
    88.
    发明申请
    OXIDATION TREATMENT METHOD AND OXIDATION TREATMENT APPARATUS 有权
    氧化处理方法和氧化处理装置

    公开(公告)号:US20120003143A1

    公开(公告)日:2012-01-05

    申请号:US13176154

    申请日:2011-07-05

    Abstract: An oxidation treatment method of the present invention includes the step of bringing a solution having an ozone concentration of 120 to 500 mg/L into contact with a substance to be treated made of a combustible substance, thereby subjecting the substance to be treated and the surface thereof to an oxidation treatment. An oxidation treatment apparatus of the present invention includes: a dissolving means that dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to form mixed fluid; an undissolved gas removal means that removes an undissolved gas from the mixed fluid to form a solution; and an oxidation treatment means that brings the solution into contact with a substance to be treated made of a combustible substance, thereby subjecting the substance to be treated and the surface thereof to an oxidation treatment.

    Abstract translation: 本发明的氧化处理方法包括使臭氧浓度为120〜500mg / L的溶液与可燃性物质的待处理物质接触,使被处理物和表面 进行氧化处理。 本发明的氧化处理装置包括:溶解在氟系溶剂中的氧 - 臭氧混合气体以形成混合流体的溶解装置; 未溶解的气体去除装置,从混合流体中除去未溶解的气体以形成溶液; 以及将溶液与可燃性物质的待处理物质接触的氧化处理装置,对被处理物及其表面进行氧化处理。

    SYSTEM AND METHOD FOR PRODUCING SUPERCRITICAL OZONE
    89.
    发明申请
    SYSTEM AND METHOD FOR PRODUCING SUPERCRITICAL OZONE 审中-公开
    用于生产超临界臭氧的系统和方法

    公开(公告)号:US20110100796A1

    公开(公告)日:2011-05-05

    申请号:US12648179

    申请日:2009-12-28

    CPC classification number: C01B13/11 C01B2201/64 Y02P20/544

    Abstract: A system for producing supercritical ozone includes a reactor having a first connecting port and a second connecting port, an ozone generator connected to the first connecting port, a fluid-driving device connected to the ozone generator and the second connecting port, and a fluid source connected to the reactor. The fluid-driving device is configured to circulate the gas in the reactor through the ozone generator. The fluid source is configured to increase the pressure in the reactor and thereby produce supercritical ozone.

    Abstract translation: 一种用于生产超临界臭氧的系统包括具有第一连接端口和第二连接端口的反应器,连接到第一连接端口的臭氧发生器,连接到臭氧发生器和第二连接端口的流体驱动装置,以及流体源 连接到反应堆。 流体驱动装置构造成使反应器中的气体通过臭氧发生器循环。 流体源构造成增加反应器中的压力并由此产生超临界臭氧。

    Pulsed ozone sparging for injecting a high volume high-concentration of ozone
    90.
    发明授权
    Pulsed ozone sparging for injecting a high volume high-concentration of ozone 有权
    用于喷射大量高浓度臭氧的脉冲臭氧喷射

    公开(公告)号:US07887762B1

    公开(公告)日:2011-02-15

    申请号:US11699136

    申请日:2007-01-27

    CPC classification number: C01B13/11 C01B13/10 C01B2201/14 C01B2201/64

    Abstract: An ozone gas source supplies a high pressure ozone gas mixture of an oxygen carrier gas having a high ozone gas concentration of 5-14% of ozone gas to a pulse storage tank. A programmable controller causes a valve means to open and transport the ozone gas mixture within the high pressure pulse storage tank into an injection point when pressure of the ozone gas mixture in the high-pressure pulse storage tank reaches a high discharge pressure site-specific set-point, and causes the valve means to close when pressure within the high pressure pulse storage tank drops and approaches a low pressure site-specific set-point. This process is repeated for injection of a gas pulse into second and subsequent injection points. The high concentration of ozone dissolves a high percentage of ozone into groundwater, producing enhanced oxidation of contaminants and the high gas pressure forces ozone into smaller pores, enhancing contact with contaminants.

    Abstract translation: 臭氧气体源将高臭氧气体浓度为臭氧气体浓度为5〜14%的氧气载气的高压臭氧气体混合物供给脉冲储存箱。 可编程控制器使得阀装置将高压脉冲储罐内的臭氧气体混合物打开并输送到注入点,当高压脉冲储罐中的臭氧气体混合物的压力达到高排放压力位置特定组 并且当高压脉冲存储罐内的压力下降并且接近低压位置特定设定点时,阀装置关闭。 重复该过程以将气体脉冲注入第二和随后的注入点。 高浓度的臭氧将高比例的臭氧溶解在地下水中,产生污染物的增强氧化,高气压迫使臭氧进入较小的孔隙,增强与污染物的接触。

Patent Agency Ranking