公开(公告)号：US20130341742A1

公开(公告)日：2013-12-26

申请号：US13924047

申请日：2013-06-21

Applicant: NextInput, Inc.

Inventor： Amnon Brosh

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0072 ,  B81B3/0021 ,  B81C1/00158 ,  B81C1/00666 ,  G01L1/044 ,  G01L1/18 ,  G01L5/0028 ,  G01L5/0057 ,  G01L5/162

Abstract: A composite wafer level MEMS force dies including a spacer coupled to a sensor is described herein. The sensor includes at least one flexible sensing element, such as a beam or diaphragm, which have one or more sensor elements formed thereon. Bonding pads connected to the sensor elements are placed on the outer periphery of the sensor. The spacer, which protects the flexible sensing element and the wire bonding pads, is bonded to the sensor. For the beam version, the bond is implemented at the outer edges of the die. For the diaphragm version, the bond is implemented in the center of the die. An interior gap between the spacer and the sensor allows the flexible sensing element to deflect. The gap can also be used to limit the amount of deflection of the flexible sensing element in order to provide overload protection.

Abstract translation: 本文描述了包括耦合到传感器的间隔件的复合晶片级MEMS力模。 传感器包括至少一个柔性传感元件，例如梁或隔膜，其具有形成在其上的一个或多个传感器元件。 连接到传感器元件的接合垫放置在传感器的外周。 保护柔性感测元件和引线接合垫的间隔件被粘合到传感器上。 对于光束版本，焊接在裸片的外边缘处实现。 对于膜片版本，键合在芯片的中心实现。 间隔器和传感器之间的内部间隙允许柔性传感元件偏转。 该间隙也可用于限制柔性传感元件的偏转量，以提供过载保护。

公开(公告)号：US20130167272A1

公开(公告)日：2013-06-27

申请号：US13821708

申请日：2011-01-10

Applicant: Seung Hoon Nahm ,  Hoon Sik Jang ,  Sang Gu Jeon ,  Min Seok Kim

Inventor： Seung Hoon Nahm ,  Hoon Sik Jang ,  Sang Gu Jeon ,  Min Seok Kim

IPC: G01Q20/00 ,  B82Y15/00

CPC classification number: G01N3/08 ,  B82Y25/00 ,  G01L1/044 ,  G01L1/16 ,  G01N3/066 ,  G01N2203/0623 ,  G01R33/093 ,  G01R33/095

Abstract: Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.

Abstract translation: 公开了一种用于纳米材料的机电复合传感器，包括：其中具有压电膜的检测器，用于当对纳米材料施加弯曲或拉伸载荷时测量纳米材料的机械性能; 当纳米材料接触第一检测膜时，同时实时地形成在检测器的端部处的第一检测膜，以测量纳米材料的机械性能和电学性质） 以及检测器的一端整体连接的支撑件，用于支撑检测器。

公开(公告)号：US20110216804A1

公开(公告)日：2011-09-08

申请号：US13110684

申请日：2011-05-18

Applicant: Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

Inventor： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC: G01K17/00

CPC classification number: G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract translation: 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20080083287A1

公开(公告)日：2008-04-10

申请号：US11631927

申请日：2005-07-14

Applicant: Daiji Uehara ,  Yasushi Yamamoto ,  Toshio Honma

Inventor： Daiji Uehara ,  Yasushi Yamamoto ,  Toshio Honma

IPC: G01L1/04 ,  H01C17/00

CPC classification number: G01L1/044 ,  G01L1/2206 ,  Y10T29/49103

Abstract: An object of the present invention is to provide a low cost load sensor while securing compact dimensions, high reliability and quality, and also to provide a manufacturing method of the load sensor. To this end, there is provided a load sensor provided with a thin-plate-like sensor plate 5 and plural strain gauges 21a to 22d attached to the sensor plate 5, wherein both ends of the sensor plate 5 in one axis direction thereof serve as fixing parts for fixing the sensor plate 5 to an arbitrary object, while the center point C of the sensor plate 5 serves as a transmission part for transmitting a displacement or a load to the sensor plate 5, wherein the strain gauges 21a to 22d are arranged in positions which are point symmetrical with respect to the center point C, and gauge pairs are constituted by making pairs of the strain gauges 21a to 22d which are arranged in point symmetrical positions electrically connected in parallel or in series with each other, and wherein the respective gauge pairs are electrically connected in series with each other to constitute a bridge circuit with the strain gauges 21a to 22d.

Abstract translation: 本发明的目的是提供一种低成本的负载传感器，同时确保紧凑的尺寸，高可靠性和高质量，并且还提供负载传感器的制造方法。 为此，提供一种负载传感器，其设置有安装在传感器板5上的薄板状传感器板5和多个应变计21a〜22d，其中传感器板5的一个轴方向的两端 用作将传感器板5固定在任意物体上的固定部件，而传感器板5的中心点C用作用于将传感器板5的位移或载荷传递到传感器板5的传递部分，其中应变仪21a至 22d被布置在相对于中心点C点对称的位置，并且量规对通过使成对的应变计21a至22d成对布置成并联或串联连接的点对称位置 并且其中相应的量规对彼此串联电连接以构成具有应变计21a至22d的桥接电路。

公开(公告)号：US20070287233A1

公开(公告)日：2007-12-13

申请号：US11818716

申请日：2007-06-15

Applicant: Changqing Zhan ,  Michael Wolfson ,  John Hartzell

Inventor： Changqing Zhan ,  Michael Wolfson ,  John Hartzell

IPC: H01L21/339

CPC classification number: B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

Abstract: A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

Abstract translation: 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

公开(公告)号：US20070245836A1

公开(公告)日：2007-10-25

申请号：US11649992

申请日：2007-01-04

Applicant: Vladimir Vaganov

Inventor： Vladimir Vaganov

IPC: G01L1/04 ,  H01L21/00

CPC classification number: H01L21/30 ,  G01L1/044 ,  G01L5/162 ,  G01L5/223 ,  G06F3/0338 ,  H01L2224/16225 ,  H01L2924/10158 ,  H01L2924/181 ,  H01L2924/00012

Abstract: The present invention is a three-dimensional force input control device for sensing vector forces and converting them into electronic signals for processing in a electronic signal processing system with all components within die fabricated from the single semiconductor substrate. The die has an elastic element, a frame formed around said elastic element, at least three mechanical stress sensitive IC components located in the elastic element, at rigid island element which transfers an external vector force to the elastic element and through the IC components provides electrical output signal, this rigid island has a height bigger than the thickness of the frame element, an external force-transferring element coupling the rigid island element with an external force and electronic circuit for processing output signals from the mechanical stress sensitive IC components. The external force transferring material can be plastic, elastic, rubber-like, combinations of and any other deformable material capable of transferring force in three dimensions. Various methods of fabricating such an input interface device on substrate are also disclosed.

Abstract translation: 本发明是一种三维力输入控制装置，用于感测向量力并将其转换为电子信号，以在电子信号处理系统中处理，其中单个半导体衬底制造的管芯内的所有部件。 模具具有弹性元件，围绕所述弹性元件形成的框架，位于弹性元件中的至少三个机械应力敏感IC元件，刚性岛元件，其将外部矢量力传递到弹性元件并通过IC元件提供电气 输出信号，该刚性岛的高度大于框架元件的厚度，将刚性岛元件与外力联接的外力传递元件和用于处理来自机械应力敏感IC部件的输出信号的电子电路。 外力传递材料可以是塑性的，弹性的，橡胶状的，组合的和能够在三维上传递力的任何其它可变形材料。 还公开了在衬底上制造这种输入接口器件的各种方法。

公开(公告)号：US07143643B2

公开(公告)日：2006-12-05

申请号：US10854756

申请日：2004-05-27

Applicant: Akira Umebayashi

Inventor： Akira Umebayashi

IPC: G01L1/04

CPC classification number: G01L5/0057 ,  G01L1/044

Abstract: A spring has a fixed end and a free end, the free end when elevated to a specific elevation from the fixed end produces a load on an object. A spring constant of the spring is calculated, a load correction amount for correcting load of the spring is calculated using the spring constant, and the spring based on the load correction amount.

Abstract translation: 弹簧具有固定端和自由端，当从固定端升高到特定高度时，自由端在物体上产生负载。 计算弹簧的弹簧常数，使用弹簧常数来计算用于校正弹簧的载荷的载荷校正量，以及基于载荷校正量的弹簧。

公开(公告)号：US06986293B2

公开(公告)日：2006-01-17

申请号：US10406773

申请日：2003-04-03

Applicant: Anton Dukart

Inventor： Anton Dukart

IPC: G01L1/26 ,  G01L5/04

CPC classification number: G01L1/14 ,  B60N2/002 ,  B60R21/01516 ,  G01G7/02 ,  G01G19/4142 ,  G01L1/044

Abstract: A force measuring device for seat weight determination in a motor vehicle includes a taking up element which has at least two bearing points. The device further includes a mechanism forming a first recess in the taking up element in a region between at least two bearing points and a rod-shaped element which extends in the longitudinal axis of the taking up element and is not loaded by bending forces. The rod-shaped element has a free end which deviates from the longitudinal axis of the taking up element when a force to be measured acts on the taking up element, and a measuring unit with a magnet and a magnetic field-sensitive sensor The magnet and the magnetic field-sensitive sensor are arranged immovably relative to one another so that the distance from the magnet to a ferromagnetic material changes under loading with the force.

Abstract translation: 用于机动车辆中的座椅重量确定的力测量装置包括具有至少两个支承点的卷取元件。 该装置还包括机构，该机构在至少两个支承点之间的区域中的卷取元件中形成第一凹部，并且在卷取元件的纵向轴线上延伸并且不被弯曲力加载的杆状元件。 当待测量的作用力作用于卷取元件时，杆状元件具有偏离卷取元件的纵向轴线的自由端，以及具有磁体和磁场敏感传感器的测量单元磁体和 磁场敏感传感器相对于彼此不可移动地布置，使得从磁体到铁磁材料的距离在载荷作用下变化。

公开(公告)号：US06976395B2

公开(公告)日：2005-12-20

申请号：US10487046

申请日：2002-08-02

Applicant: Dietmar Arndt ,  Reinhard Hegewald ,  Thomas Hellfeld ,  Lutz Schmidt ,  Bernhard Steiger

Inventor： Dietmar Arndt ,  Reinhard Hegewald ,  Thomas Hellfeld ,  Lutz Schmidt ,  Bernhard Steiger

IPC: G01L1/04 ,  G01L9/00 ,  G01L11/02 ,  G01L23/16

CPC classification number: G01L23/16 ,  G01L1/044 ,  G01L9/0077 ,  G01L11/02

Abstract: The invention relates to optical devices for measuring pressure or force, comprising an electromagnetic radiation source, and a pressure membrane or a spiral spring which has a surface that at least partially reflects the electromagnetic rays of the electromagnetic radiation source. The inventive devices are especially characterized in that they allow, inter alia, measurement of even the slightest pressure changes of fluids and other flowable materials in the stationary and/or flowing state or even the slightest mechanical deformations on spiral springs. In order to do this, the rays of an electromagnetic radiation source are incident on the at least partially reflective surface of the pressure membrane or spiral spring. At least one section of a stationarily located body or of a stationarily located body having a reflective layer is disposed in the path of the reflected rays, upstream of a photodetector for said rays, and projects into said rays. A mechanical modification causes the reflected rays to be absorbed, diffracted, reflected again and/or split to a higher or lesser extent by the body.

Abstract translation: 本发明涉及用于测量压力或力的光学装置，包括电磁辐射源，以及具有至少部分地反映电磁辐射源的电磁射线的表面的压力膜或螺旋弹簧。 本发明的装置的特征在于，它们尤其允许测量在静止和/或流动状态下的流体和其它可流动材料的甚至最轻微的压力变化，甚至在螺旋弹簧上甚至最轻微的机械变形。 为了做到这一点，电磁辐射源的射线入射到压力膜或螺旋弹簧的至少部分反射表面上。 具有反射层的固定位置体或固定位置体的至少一个部分设置在反射射线的路径中，用于所述射线的光电检测器的上游并投射到所述射线中。 机械修改使得反射的光线被身体吸收，衍射，反射和/或分裂到或多或少的程度。

公开(公告)号：US20050160836A1

公开(公告)日：2005-07-28

申请号：US11038193

申请日：2005-01-21

Applicant: Hideyuki Hayakawa ,  Kenji Morikawa ,  Tetsuo Imamura

Inventor： Hideyuki Hayakawa ,  Kenji Morikawa ,  Tetsuo Imamura

IPC: B60T7/02 ,  G01L1/04 ,  G01L1/20 ,  G01L5/22 ,  G05G1/00 ,  G05G1/30 ,  G05G1/38 ,  G05G1/44 ,  G01L1/00

CPC classification number: G01L5/225 ,  F02D2200/602 ,  G01L1/044 ,  G01L1/20 ,  G05G1/30 ,  G05G1/38 ,  G05G1/44 ,  G05G1/506

Abstract: In a pedal force detection device, a pedal arm unit is provided with a first arm at which a pedal is mounted, a second arm apart from the pedal and a connection portion for connecting the first and second arms. A load sensor having a matrix made of a ceramics is fixed between the first and second arms. When the pedal is depressed by a pedal force, the first arm approaches the second arm due to a resilient deformation so that the load sensor is compressed by a load. Thus, the pedal force can be determined based on the load detected by the load sensor.

Abstract translation: 在踏板力检测装置中，踏板臂单元设置有第一臂，踏板安装在该第一臂上，与踏板相隔的第二臂和用于连接第一和第二臂的连接部。 具有由陶瓷制成的矩阵的载荷传感器固定在第一和第二臂之间。 当踏板被踏板踩下时，第一臂由于弹性变形而接近第二臂，使得负载传感器被负载压缩。 因此，可以基于由负载传感器检测到的负载来确定踏板力。