Abstract:
An infrared array sensor having an array of infrared sensors of different plural types for detecting infrared rays of different plural wavelength bands. Each sensor includes a diaphragm separated from a substrate by a thermally insulating cavity. The heighths of one of the diaphragm and the cavity are different in each of the plural types of sensors.
Abstract:
Various methods of inspecting a film on a semiconductor workpiece for a residue are provided. In one aspect, a method of inspecting a film on a semiconductor workpiece wherein the film has a known infrared signature is provided. The method includes heating the workpiece so that the film emits infrared radiation and sensing the infrared radiation emitted from the film. The infrared signature of the radiation emitted from the film is compared with the known infrared signature and a signal indicative of a deviation between the infrared signature of the emitted infrared radiation and the known infrared signature is generated. The method enables the rapid and accurate detection of residues, such as oxide residues on nitride films.
Abstract:
A system and method are provided for use with an uncooled infrared sensor. The system and method include a temperature compensated performance algorithm which is utilized to provide temperature compensated response and offset correction coefficients which are applied to a video signal of the infrared sensor to correct for variations in the video signal caused by temperature changes of the sensor.
Abstract:
An improved gas detector apparatus includes a spectral source/bolometer for conducting an electrical current and for producing infrared radiation. The source/bolometer has a characteristic resistance that is a predetermined function of the source/bolometer temperature. A concentrating reflector directs the infrared radiation through a spectral filter and the gas. A return reflector is disposed along the axis beyond the spectral filer and the gas, such that at least a portion of the infrared radiation passing through the filter and the gas is reflected back through the gas and the filter to the source/bolometer. A driver/detector drives a current through the source/bolometer, determines the characteristic resistance of the source/bolometer, and detects the gas from a variation of the characteristic resistance.
Abstract:
A coating is detected on a substantially planar object (9), such as a sheet, which is moving in a predetermined direction. The object has a coating (30) on at least a part of its planar surface, which coating is at least partially transparent to visible radiation. An emitter (33) is adapted to emit a beam of substantially non-visible electromagnetic radiation having a predetermined wavelength range towards the object (9). A scanner (36) is adapted to scan the beam of electromagnetic radiation in a direction that has at least a component transverse to the predetermined direction. A sensor (34) detects radiation in the predetermined wavelength range which is reflected in a specular manner by the object (9). The presence and/or absence of a coating (30) on the object is determined on the basis of the magnitude of specularly reflected radiation.
Abstract:
A property of a layer of a phosphor screen on a substrate is determined by sending a beam of infrared radiation through the substrate and the layer and measuring, after the passage, the intensity of the beam. The radiation can be measured by a CCD camera.
Abstract:
An optical spectrometer system has a central axis, a detector having a detector surface disposed at one end of the system and located at a focal plane of the optical spectrometer system. A cold stop is associated with the detector for permitting entrance of target source radiation onto the detector surface while blocking background radiation from surroundings. A cooling device is coupled to the detector for cooling it and the cold stop to a predetermined low temperature. A flat plate is provided and has an spectrometer slit formed in it, the plate having a flat surface facing the detector, the flat surface being coated with a highly reflective, low emissivity material. Fore-optic focusing lenses or mirrors are located in front of the flat plate for focusing radiation onto the slit on the flat plate between the fore-optic focusing and the collimating lenses. The collimating lenses between the flat plate and the cold stop collimate the light from the slit and form a pupil at the cold stop. Both the fore-optic focusing lenses and the collimating lenses are designed such that the space between them is telecentric. This allows the use of an uncooled flat high reflective slit body that has very little self emission yet it does not reflect the background thermal radiation from the spectrometer cavity into the cold stop and impinge on the detector.
Abstract:
A body temperature detector is particularly suited to axillary temperature measurements of adults. The radiation sensor views a target surface area of the body and electronics compute an internal temperature of the body as a function of ambient temperature and sensed surface temperature. The function includes a weighted difference of surface temperature and ambient temperature, the weighting being varied with target temperature to account for varying perfusion rate. Preferably, the coefficient varies from a normal of about 0.13 through a range to include 0.09. The ambient temperature used in the function is assumed at about 80° F. but modified with detector temperature weighted by 20%.
Abstract:
A head-up display, an IR camera and associated electronics including power are integrated into portable, self-contained, wrap-around, face-worn vision-enhancement apparatus useful in environments of dense air-borne particulate and thermal extremes such as encountered in fire fighting situations, in accordance with the invention. Reflective and opaque lenses are provided at approximately eye level for IR, vision display and blinding purposes, respectively, to produce a clear bright picture of a scene otherwise obscured by darkness or obscurants. The IR camera is integral with wrap-around system along with a self-contained power supply so that the system is portable and requires no umbilical cord or other external connections. An optical axis of the IR camera and an axis describing the user's virtual line of sight through the viewing eye converge at a nominal arm's length in front of the user's viewing eye, e.g. 3 feet away. The imager is preferably an un-cooled focal plane array and associated imaging, storing, processing and displaying electronics are cooled in the extreme thermal environment using an integral plural phase heatsink. The apparatus is separate from, but compatible with, helmets and SCBA gear worn by the user so that it can easily be installed and removed by an individual user. Extended hands-free operation is provided in a lightweight package providing enhanced vision via color-coded temperature banding for display purposes, the color coding being performed in microprocessor-based firmware that forms part of the electronics. The apparatus may be temporarily affixed via a clip to the brim of a helmet and may be easily shifted on the user's face from its normal night-vision position to a temporary stowed position in front of the forehead whereby the user has virtually unobstructed binocular vision.
Abstract:
A semiconductor nanocrystal compound is described which is capable of linking to one or more affinity molecules. The compound comprises (1) one or more semiconductor nanocrystals capable of, in response to exposure to a first energy, providing a second energy, and (2) one or more linking agents, having a first portion linked to the one or more semiconductor nanocrystals and a second portion capable of linking to one or more affinity molecules. One or more of these semiconductor nanocrystal compounds are linked to one or more affinity molecules to form a semiconductor nanocrystal probe capable of bonding with one or more detectable substances in a material being analyzed, and capable of, in response to exposure to a first energy, providing a second energy. Treatment of a material with the semiconductor nanocrystal probe, and subsequent exposure of this treated material to a first energy, to determine the presence of the detectable substance within the material bonded to the probe, will excite the semiconductor nanocrystal in the probe bonded to the detectable substance, causing the probe to provide a second energy signifying the presence, in the material, of the detectable substance bonded to the semiconductor nanocrystal probe. Also described are processes for respectively making the semiconductor nanocrystal compound and the semiconductor nanocrystal probe. Processes are also described for treating materials with the probe, for example, to determine the presence of a detectable substance in the material bonded to the probe.