Flow-stabilized wet scrubber system for treatment of process gases from
semiconductor manufacturing operations
    2.
    发明授权
    Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations 失效
    用于处理来自半导体制造操作的工艺气体的流动稳定的湿式洗涤器系统

    公开(公告)号:US5851293A

    公开(公告)日:1998-12-22

    申请号:US708256

    申请日:1996-09-06

    CPC classification number: C23C16/4412 B01D53/74 B01J3/002

    Abstract: A flow stabilization system for damping pressure variations in a process discharging an effluent gas stream, in which the process is pressure-sensitive and downstream pressure variations can adversely affect the upstream process, said system comprising a motive fluid driver constructed and arranged to receive the effluent gas stream from the process, and means for sensing a flow characteristic of the effluent gas stream and responsively adjusting the flow of the effluent gas stream to damp pressure fluctuations in the process. The flow stabilization system may further comprise: (i) a variable frequency drive for motively operating the motive fluid driver at a correspondingly variable rotational speed; (ii) a pressure transducer monitor for monitoring the flow characteristic of the effluent gas stream and generating a pressure transduced signal; and (iii) a proportional integral derivative controller coupled in pressure transduced signal-receiving relationship with the pressure transducer monitor, and responsive to the pressure transduced signal to correspondingly adjust the variable frequency drive and responsively selectively drive the motive fluid driver to damp pressure fluctuations in the process. The system has applicability to stabilizing pressure-sensitive processes such as vapor phase coating and reaction processes in semiconductor manufacturing.

    Abstract translation: 一种流动稳定系统,用于阻止排放废气流的过程中的压力变化,其中所述过程是压力敏感的和下游的压力变化可能不利地影响上游过程,所述系统包括构造和布置成接收流出物的动力流体驱动器 来自该过程的气流,以及用于感测流出气流的流动特征的装置,并且响应地调节流出气流的流量以减轻该过程中的压力波动。 流动稳定系统还可以包括:(i)可变频率驱动器,用于以相应可变的转速动态地操作动力流体驱动器; (ii)压力传感器监测器,用于监测废气流的流动特性并产生压力传导信号; 和(iii)比例积分微分控制器,其与压力传感器监测器耦合在压力传导的信号接收关系中,并且响应于压力转换信号来相应地调节变频驱动器并且响应地选择性地驱动运动流体驱动器以减轻压力波动 的过程。 该系统适用于稳定压敏工艺,例如半导体制造中的气相涂覆和反应过程。

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