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1.发明授权Method and handling apparatus for placing patterning device on support member for charged particle beam imaging 有权用于将图案形成装置放置在用于带电粒子束成像的支撑构件上的方法和处理装置公开(公告)号：US07868303B2
公开(公告)日：2011-01-11
申请号：US12249640
申请日：2008-10-10
Applicant: You-Jin Wang , Hsuan-Bin Huang , Chung-Shih Pan
Inventor： You-Jin Wang , Hsuan-Bin Huang , Chung-Shih Pan
CPC classification number: H01L21/68707 , H01J2237/204
Abstract: A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second gripping member. The first gripping member is equipped with a plurality of first positioning projections, and the second gripping member is equipped with a plurality of second positioning projections. When the patterning device is held at one angle, the first positioning projections abut against one edge of the patterning device and the second positioning projections abut against the opposite edge of the patterning device. When the patterning device is held at another angle, the first positioning projections abut against two neighboring edges of the patterning device, and the second positioning projections abut against the other two neighboring edges of the patterning device. Therefore, the disclosed patterning device handling apparatus can hold the pattering device at different angles.
Abstract translation: 公开了一种用于带电粒子束成像的图案形成装置处理装置。 所公开的图案形成装置处理装置包括第一夹持构件和第二夹持构件。 第一夹持构件配备有多个第一定位突起，并且第二夹持构件配备有多个第二定位突起。 当图案形成装置保持一角度时，第一定位突起抵靠图案形成装置的一个边缘，并且第二定位突起抵靠图案形成装置的相对边缘。 当图案形成装置保持在另一个角度时，第一定位突起邻接图案形成装置的两个相邻边缘，并且第二定位突起抵靠图案形成装置的另外两个相邻的边缘。 因此，所公开的图案形成装置处理装置可以以不同的角度保持图案装置。
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公开(公告)号：US20100102226A1
公开(公告)日：2010-04-29
申请号：US12256828
申请日：2008-10-23
Applicant: Hsuan-Bin HUANG , You-Jin Wang , Chung-Shih Pan
Inventor： Hsuan-Bin HUANG , You-Jin Wang , Chung-Shih Pan
IPC: H01J37/20
CPC classification number: H01J37/20 , H01J2237/2007 , H01J2237/20207
Abstract: A patterning device holding apparatus includes a support platform unit with a plurality of first positioning projections and a gripper unit. The gripper unit includes a head portion and a plurality of second positioning projections disposed on the head portion, and a rolling member set at a base portion. The grapping and releasing of the patterning device is achieved by the rotation of the gripper unit about a pivot substantially parallel with the center axis of the rolling member. The first and second positioning projections corporately abut against the edges of a patterning device to fix the patterning device in place.
Abstract translation: 图案形成装置保持装置包括具有多个第一定位突起和夹持单元的支撑平台单元。 夹持单元包括头部和设置在头部上的多个第二定位突起，以及设置在基部的滚动体。 图案形成装置的拍摄和释放通过夹持器单元围绕基本上平行于滚动构件的中心轴线的枢轴的旋转来实现。 第一和第二定位突起共同地抵靠图案形成装置的边缘，以将图案形成装置固定就位。
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公开(公告)号：US07838848B2
公开(公告)日：2010-11-23
申请号：US12256828
申请日：2008-10-23
Applicant: Hsuan-Bin Huang , You-Jin Wang , Chung-Shih Pan
Inventor： Hsuan-Bin Huang , You-Jin Wang , Chung-Shih Pan
CPC classification number: H01J37/20 , H01J2237/2007 , H01J2237/20207
Abstract: A patterning device holding apparatus includes a support platform unit with a plurality of first positioning projections and a gripper unit. The gripper unit includes a head portion and a plurality of second positioning projections disposed on the head portion, and a rolling member set at a base portion. The grapping and releasing of the patterning device is achieved by the rotation of the gripper unit about a pivot substantially parallel with the center axis of the rolling member. The first and second positioning projections corporately abut against the edges of a patterning device to fix the patterning device in place.
Abstract translation: 图案形成装置保持装置包括具有多个第一定位突起和夹持单元的支撑平台单元。 夹持单元包括头部和设置在头部上的多个第二定位突起，以及设置在基部的滚动体。 图案形成装置的拍摄和释放通过夹持器单元围绕基本上平行于滚动构件的中心轴线的枢轴的旋转来实现。 第一和第二定位突起共同地抵靠图案形成装置的边缘，以将图案形成装置固定就位。
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4.发明申请公开(公告)号：US20100090107A1
公开(公告)日：2010-04-15
申请号：US12249640
申请日：2008-10-10
Applicant: You-Jin WANG , Hsuan-Bin HUANG , Chung-Shih PAN
Inventor： You-Jin WANG , Hsuan-Bin HUANG , Chung-Shih PAN
CPC classification number: H01L21/68707 , H01J2237/204
Abstract: A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second gripping member. The first gripping member is equipped with a plurality of first positioning projections, and the second gripping member is equipped with a plurality of second positioning projections. When the patterning device is held at one angle, the first positioning projections abut against one edge of the patterning device and the second positioning projections abut against the opposite edge of the patterning device. When the patterning device is held at another angle, the first positioning projections abut against two neighboring edges of the patterning device, and the second positioning projections abut against the other two neighboring edges of the patterning device. Therefore, the disclosed patterning device handling apparatus can hold the pattering device at different angles.
Abstract translation: 公开了一种用于带电粒子束成像的图案形成装置处理装置。 所公开的图案形成装置处理装置包括第一夹持构件和第二夹持构件。 第一夹持构件配备有多个第一定位突起，并且第二夹持构件配备有多个第二定位突起。 当图案形成装置保持一角度时，第一定位突起抵靠图案形成装置的一个边缘，并且第二定位突起抵靠图案形成装置的相对边缘。 当图案形成装置保持在另一个角度时，第一定位突起邻接图案形成装置的两个相邻边缘，并且第二定位突起抵靠图案形成装置的另外两个相邻的边缘。 因此，所公开的图案形成装置处理装置可以以不同的角度保持图案装置。
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