公开(公告)号：US20150129399A1

公开(公告)日：2015-05-14

申请号：US13981954

申请日：2012-07-31

Applicant: Kadoor Microelectronics Ltd.

Inventor： Shai Feldman ,  Oren Aharon

IPC: H01H29/06

CPC classification number: H01H29/06 ,  B81B2201/018 ,  B81C1/00333 ,  B81C1/00341 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01H29/00 ,  H01H2029/008 ,  H01H2203/028

Abstract: Devices for switching or tuning of an electrical circuit comprise a liquid metal (LM) drop confined inside a sealed cavity. The cavity is formed at least partially inside a microelectronics layered structure which includes metal, dielectric and semiconductor layers. The microelectronics layered structure may be prepared using a VLSI/CMOS technology. Some of the VLSI/CMOS metal layers or metalized vias may be used for conduction lines contacted by the LM drop or as RF transmission lines opened or closed by the LM drop.

Abstract translation: 用于切换或调谐电路的装置包括限定在密封空腔内的液态金属（LM）液滴。 空腔至少部分地形成在包括金属，电介质和半导体层的微电子分层结构内部。 微电子分层结构可以使用VLSI / CMOS技术来制备。 VLSI / CMOS金属层或金属化通孔中的一些可以用于与LM压降接触的导线，或者作为由LM压降打开或闭合的RF传输线。