APPARATUS AND METHOD FOR TUNING PUMP SPEED
    1.
    发明申请
    APPARATUS AND METHOD FOR TUNING PUMP SPEED 有权
    调节泵速度的装置和方法

    公开(公告)号:US20110200450A1

    公开(公告)日:2011-08-18

    申请号:US12706167

    申请日:2010-02-16

    Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.

    Abstract translation: 公开了一种使用自动化方法以最佳或期望速度调节泵速度的装置。 该装置包括连接到室的真空泵,用于从室抽空气体。 传感器测量室内的气体的一个或多个特性,例如压力。 将测量的特性与预定值进行比较。 基于比较调节真空泵的速度,直到它落在所需的范围内。

    Apparatus and method for tuning pump speed
    2.
    发明授权
    Apparatus and method for tuning pump speed 有权
    调速泵速度的装置和方法

    公开(公告)号:US08657584B2

    公开(公告)日:2014-02-25

    申请号:US12706167

    申请日:2010-02-16

    Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.

    Abstract translation: 公开了一种使用自动化方法以最佳或期望速度调节泵速度的装置。 该装置包括连接到室的真空泵,用于从室抽空气体。 传感器测量室内的气体的一个或多个特性,例如压力。 将测量的特性与预定值进行比较。 基于比较调节真空泵的速度,直到它落在所需的范围内。

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