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公开(公告)号:US20110200450A1
公开(公告)日:2011-08-18
申请号:US12706167
申请日:2010-02-16
Applicant: Gerald Robin SHELLEY , Mark Kollin ROMEO , Jeffrey Robert SCHWAB
Inventor: Gerald Robin SHELLEY , Mark Kollin ROMEO , Jeffrey Robert SCHWAB
IPC: F04B49/00
CPC classification number: F04B49/20 , F04B37/14 , F04B49/08 , F04B2201/1201 , F04B2207/02
Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.
Abstract translation: 公开了一种使用自动化方法以最佳或期望速度调节泵速度的装置。 该装置包括连接到室的真空泵,用于从室抽空气体。 传感器测量室内的气体的一个或多个特性,例如压力。 将测量的特性与预定值进行比较。 基于比较调节真空泵的速度,直到它落在所需的范围内。
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公开(公告)号:US08657584B2
公开(公告)日:2014-02-25
申请号:US12706167
申请日:2010-02-16
Applicant: Gerald Robin Shelley , Mark Kollin Romeo , Jeffrey Robert Schwab
Inventor: Gerald Robin Shelley , Mark Kollin Romeo , Jeffrey Robert Schwab
CPC classification number: F04B49/20 , F04B37/14 , F04B49/08 , F04B2201/1201 , F04B2207/02
Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.
Abstract translation: 公开了一种使用自动化方法以最佳或期望速度调节泵速度的装置。 该装置包括连接到室的真空泵,用于从室抽空气体。 传感器测量室内的气体的一个或多个特性,例如压力。 将测量的特性与预定值进行比较。 基于比较调节真空泵的速度,直到它落在所需的范围内。
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