公开(公告)号：US08004154B2

公开(公告)日：2011-08-23

申请号：US12898292

申请日：2010-10-05

Applicant: Matthieu Cueff ,  Emmanuel Defay ,  François Perruchot ,  Patrice Rey

Inventor： Matthieu Cueff ,  Emmanuel Defay ,  François Perruchot ,  Patrice Rey

IPC: H01L41/08

CPC classification number: H01L41/094 ,  H01L41/0825 ,  H01L41/29 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

Abstract: The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.

Abstract translation: 本发明涉及一种压电致动结构，其包括至少一个应变计和至少一个致动器，其由布置在底部电极层和顶部电极层之间的至少一层压电材料层的衬底的表面上的堆叠产生， 形成致动器的堆的至少一部分被布置在衬底中产生的腔的上方，其特征在于应变计是位于顶电极层和/或底电极层中的压阻计，所述层包括电极不连续 使得可以制造所述压阻计。 本发明还涉及这种结构的制造方法。

公开(公告)号：US20110080069A1

公开(公告)日：2011-04-07

申请号：US12898292

申请日：2010-10-05

Applicant: Matthieu CUEFF ,  Emmanuel DEFAY ,  François PERRUCHOT ,  Patrice REY

Inventor： Matthieu CUEFF ,  Emmanuel DEFAY ,  François PERRUCHOT ,  Patrice REY

IPC: H02N2/00 ,  H01L41/22

CPC classification number: H01L41/094 ,  H01L41/0825 ,  H01L41/29 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

Abstract: The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.

Abstract translation: 本发明涉及一种压电致动结构，其包括至少一个应变计和至少一个致动器，其由布置在底部电极层和顶部电极层之间的至少一层压电材料层的衬底的表面上的堆叠产生， 形成致动器的堆的至少一部分被布置在衬底中产生的腔的上方，其特征在于应变计是位于顶电极层和/或底电极层中的压阻计，所述层包括电极不连续 使得可以制造所述压阻计。 本发明还涉及这种结构的制造方法。

公开(公告)号：US20120306322A1

公开(公告)日：2012-12-06

申请号：US13481476

申请日：2012-05-25

Applicant: Matthieu CUEFF ,  Emmanuel DEFAY ,  Gwenaël LE RHUN

Inventor： Matthieu CUEFF ,  Emmanuel DEFAY ,  Gwenaël LE RHUN

IPC: H01L41/04 ,  H01L41/24 ,  B05D5/12 ,  H01L41/047 ,  H01L41/18

CPC classification number: H01L41/29 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0815

Abstract: An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.

Abstract translation: 电气部件包括在基板表面的下电极和上电极之间的铅基钙钛矿晶体材料层，其特征在于，所述下电极包括由第一材料制成的稳定化第一层和由 第二材料，第一和第二材料具有相同的化学组成但不同的结构参数和/或密度。 还提供了一种制造组件的方法，其中具有钙钛矿结构的材料可以是具有（100）或（111）取向的PZT。

公开(公告)号：US08692443B2

公开(公告)日：2014-04-08

申请号：US13481476

申请日：2012-05-25

Applicant: Matthieu Cueff ,  Emmanuel Defay ,  Gwenael Le Rhun

Inventor： Matthieu Cueff ,  Emmanuel Defay ,  Gwenael Le Rhun

IPC: H01L41/047

CPC classification number: H01L41/29 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0815

Abstract: An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.

Abstract translation: 电气部件包括在基板表面的下电极和上电极之间的铅基钙钛矿晶体材料层，其特征在于，所述下电极包括由第一材料制成的稳定化第一层和由 第二材料，第一和第二材料具有相同的化学组成但不同的结构参数和/或密度。 还提供了一种制造组件的方法，其中具有钙钛矿结构的材料可以是具有（100）或（111）取向的PZT。