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1.发明授权Photosensitive composition, pattern forming material, and photosensitive film, pattern forming method, pattern film, low refractive index film, optical device and solid-state imaging device each using the same 失效感光组合物，图案形成材料和感光膜，图案形成方法，图案膜，低折射率膜，光学器件和使用其的固体摄像器件公开(公告)号：US08753801B2
公开(公告)日：2014-06-17
申请号：US13172937
申请日：2011-06-30
Applicant: Toshiyuki Saie , Kenji Wada , Masaomi Makino , Hisamitsu Tomeba , Mitsuji Yoshibayashi
Inventor： Toshiyuki Saie , Kenji Wada , Masaomi Makino , Hisamitsu Tomeba , Mitsuji Yoshibayashi
IPC: G03F7/00
CPC classification number: G03F7/091 , G03F7/0007 , G03F7/0047 , G03F7/033 , H01L2924/3025 , Y10T428/24802 , H01L2924/00
Abstract: A photosensitive composition contains (A) a hollow or porous particle, (B) a compound capable of generating an active species upon irradiation with an actinic ray or radiation, and (C) a compound capable of changing in the solubility for an alkali developer by the action of the active species.
Abstract translation: 光敏组合物含有（A）中空或多孔颗粒，（B）能够在用光化学射线或辐射照射时能够产生活性物质的化合物，和（C）能够通过以下方式改变碱显影剂的溶解度的化合物： 活性物种的作用。
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2.发明申请COLOR FILTER, METHOD FOR PRODUCING THE SAME, AND SOLID-STATE IMAGING DEVICE 审中-公开彩色滤光器，其制造方法和固态成像装置公开(公告)号：US20110026153A1
公开(公告)日：2011-02-03
申请号：US12918468
申请日：2008-12-19
Applicant: Mitsuji Yoshibayashi
Inventor： Mitsuji Yoshibayashi
CPC classification number: G02B5/286 , G02B5/201 , G02B5/223 , G03F7/0007
Abstract: A method for producing a color filter in such a manner that a first color pattern is formed in a stripe shape on a support, a second color layer is formed on the support on which the above-mentioned first color pattern has been formed, an area for forming a third color pattern in the above-mentioned first color pattern and/or the above-mentioned second color layer is removed by dry etching, and the third color pattern is formed in the area, from where the above-mentioned first color pattern and the above-mentioned second color layer have been removed, on the above-mentioned support.
Abstract translation: 一种彩色滤光片的制造方法，其特征在于，在支撑体上形成条纹状的第一色彩图案，在形成上述第一色彩图案的支撑体上形成第二色层， 用于通过干蚀刻去除上述第一颜色图案中的第三颜色图案和/或上述第二颜色层，并且在第三颜色图案形成在上述第一颜色图案 并且在上述支撑体上已经去除了上述第二颜色层。
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公开(公告)号：US07914957B2
公开(公告)日：2011-03-29
申请号：US11843911
申请日：2007-08-23
Applicant: Mitsuji Yoshibayashi
Inventor： Mitsuji Yoshibayashi
IPC: G03F1/00
CPC classification number: G02F1/133516 , G02B5/223
Abstract: The present invention provides a production method for a color filter including forming a first colored layer on a support, forming a photoresist layer on the first colored layer, forming an image on the first colored layer by removing the photoresist layer in the form of an image pattern, etching the first colored layer in the form of the image formed in the forming the image by use of a dry etching process that uses a mixed gas in which a fluorine-based gas and oxygen (O2) are mixed at a mixing ratio (fluorine-based gas/O2), by flow rate ratio, in the range of from 2/1 to 8/1, and removing the photoresist layer remaining after the etching.
Abstract translation: 本发明提供了一种滤色片的制造方法，包括在支撑体上形成第一着色层，在第一着色层上形成光致抗蚀剂层，通过除去图像形式的光致抗蚀剂层，在第一着色层上形成图像 以形成图像的图像形式的第一着色层通过使用混合气体的干式蚀刻工艺进行蚀刻，所述混合气体以混合比混合氟基气体和氧气（O 2） 氟系气体/ O 2），流速比为2/1〜8/1，除去蚀刻后残留的光致抗蚀剂层。
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公开(公告)号：US08343365B2
公开(公告)日：2013-01-01
申请号：US11779212
申请日：2007-07-17
Applicant: Mitsuji Yoshibayashi
Inventor： Mitsuji Yoshibayashi
CPC classification number: G03F7/0007
Abstract: The invention provides a color filter producing method that is based on dry etching and makes it possible to produce a color filter which has fine and rectangular pixels and is excellent in flatness, and color filters produced by the method. The method is a color filter producing method of forming a first colorant-containing layer on a support, removing the first colorant-containing layer corresponding to a region where a second colorant-containing layer is to be formed by dry etching, forming the second colorant-containing layer so as to be embedded into the layer-removed region, removing the first and second colorant-containing layers corresponding to a region where a third colorant-containing layer is to be formed by dry etching, forming the third colorant-containing layer so as to be embedded into the layer-removed region, and removing the colorant-containing layers laminated on other colorant-containing layers.
Abstract translation: 本发明提供了一种基于干蚀刻的滤色器制造方法，并且可以制造具有精细和矩形像素并且平坦度优异的滤色器以及通过该方法制造的滤色器。 该方法是一种在支持体上形成第一含着色剂层的滤色器制造方法，通过干法蚀刻除去与要形成第二含着色剂的层相对应的第一含着色剂层，形成第二着色剂层 以便嵌入去除层的区域中，通过干蚀刻去除与要形成第三含着色剂的层相对应的区域的第一和第二含着色剂的层，形成第三含着色剂的层 以便将其嵌入除去去的区域中，并除去层叠在其它含着色剂层上的含着色剂层。
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5.发明申请COLOR FILTER AND METHOD OF MANUFACTURING THE SAME, AND SOLID-STATE IMAGE PICKUP ELEMENT 有权彩色滤光片及其制造方法和固态图像拾取元件公开(公告)号：US20080206659A1
公开(公告)日：2008-08-28
申请号：US12031128
申请日：2008-02-14
Applicant: Mitsuji YOSHIBAYASHI , Teruaki KINUMURA , Tomoyuki KIKUCHI
Inventor： Mitsuji YOSHIBAYASHI , Teruaki KINUMURA , Tomoyuki KIKUCHI
IPC: G03F1/00
CPC classification number: G02B5/201
Abstract: The present invention provides a method of manufacturing a color filter, including: forming a first color pattern in a repeating pattern on a support; forming, on the support, a second color pattern in a repeating pattern in regions where the first color pattern is not formed; removing at least one portion of one of the first color pattern and the second color pattern by dry-etching, the portion being in a region where a third color pattern is to be formed; and forming, on the support, the third color pattern in the region where the portion of one of the first color pattern and the second color pattern has been removed. The present invention also provides a color filter manufactured by the method, and a solid-state image pickup element using the color filter.
Abstract translation: 本发明提供一种制造滤色器的方法，包括：在支撑体上形成重复图案的第一颜色图案; 在不形成第一颜色图案的区域中，在支撑体上形成重复图案中的第二颜色图案; 通过干蚀刻去除第一颜色图案和第二颜色图案中的一个的至少一部分，该部分在要形成第三颜色图案的区域中; 以及在所述支撑体上形成已经去除了所述第一颜色图案和所述第二颜色图案中的一个的所述部分的区域中的所述第三颜色图案。 本发明还提供了一种通过该方法制造的滤色器和使用该滤色器的固态图像拾取元件。
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Patent Agency Ranking
公开(公告)号：US20080053953A1
公开(公告)日：2008-03-06
申请号：US11843911
申请日：2007-08-23
Applicant: Mitsuji YOSHIBAYASHI
Inventor： Mitsuji YOSHIBAYASHI
IPC: B44C1/22
CPC classification number: G02F1/133516 , G02B5/223
Abstract: The present invention provides a production method for a color filter including forming a first colored layer on a support, forming a photoresist layer on the first colored layer, forming an image on the first colored layer by removing the photoresist layer in the form of an image pattern, etching the first colored layer in the form of the image formed in the forming the image by use of a dry etching process that uses a mixed gas in which a fluorine-based gas and oxygen (O2) are mixed at a mixing ratio (fluorine-based gas/O2), by flow rate ratio, in the range of from 2/1 to 8/1, and removing the photoresist layer remaining after the etching.
Abstract translation: 本发明提供了一种滤色片的制造方法，包括在支撑体上形成第一着色层，在第一着色层上形成光致抗蚀剂层，通过除去图像形式的光致抗蚀剂层，在第一着色层上形成图像 通过使用使用其中氟基气体和氧气（O 2 O 2）的混合气体的干蚀刻方法蚀刻形成图像形式的图像形式的第一着色层， ）以2/1〜8/1的范围内的混合比（氟系气体/ O 2/2）以流量比混合，除去残留在 蚀刻。
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7.发明授权公开(公告)号：US08158307B2
公开(公告)日：2012-04-17
申请号：US12031128
申请日：2008-02-14
Applicant: Mitsuji Yoshibayashi , Teruaki Kinumura , Tomoyuki Kikuchi
Inventor： Mitsuji Yoshibayashi , Teruaki Kinumura , Tomoyuki Kikuchi
IPC: G02B5/20
CPC classification number: G02B5/201
Abstract: The present invention provides a method of manufacturing a color filter, including: forming a first color pattern in a repeating pattern on a support; forming, on the support, a second color pattern in a repeating pattern in regions where the first color pattern is not formed; removing at least one portion of one of the first color pattern and the second color pattern by dry-etching, the portion being in a region where a third color pattern is to be formed; and forming, on the support, the third color pattern in the region where the portion of one of the first color pattern and the second color pattern has been removed. The present invention also provides a color filter manufactured by the method, and a solid-state image pickup element using the color filter.
Abstract translation: 本发明提供一种制造滤色器的方法，包括：在支撑体上形成重复图案的第一颜色图案; 在不形成第一颜色图案的区域中，在支撑体上形成重复图案中的第二颜色图案; 通过干蚀刻去除第一颜色图案和第二颜色图案中的一个的至少一部分，该部分在要形成第三颜色图案的区域中; 以及在所述支撑体上形成已经去除了所述第一颜色图案和所述第二颜色图案中的一个的所述部分的区域中的所述第三颜色图案。 本发明还提供了一种通过该方法制造的滤色器和使用该滤色器的固态图像拾取元件。
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8.发明申请PHOTOSENSITIVE COMPOSITION, PATTERN FORMING MATERIAL, AND PHOTOSENSITIVE FILM, PATTERN FORMING METHOD, PATTERN FILM, LOW REFRACTIVE INDEX FILM, OPTICAL DEVICE AND SOLID-STATE IMAGING DEVICE EACH USING THE SAME 失效光敏组合物，图案形成材料和感光膜，图案形成方法，图案膜，低折射指数膜，光学装置和使用其的固态成像装置公开(公告)号：US20120003436A1
公开(公告)日：2012-01-05
申请号：US13172937
申请日：2011-06-30
Applicant: Toshiyuki SAIE , Kenji WADA , Masaomi MAKINO , Hisamitsu TOMEBA , Mitsuji YOSHIBAYASHI
Inventor： Toshiyuki SAIE , Kenji WADA , Masaomi MAKINO , Hisamitsu TOMEBA , Mitsuji YOSHIBAYASHI
CPC classification number: G03F7/091 , G03F7/0007 , G03F7/0047 , G03F7/033 , H01L2924/3025 , Y10T428/24802 , H01L2924/00
Abstract: A photosensitive composition contains (A) a hollow or porous particle, (B) a compound capable of generating an active species upon irradiation with an actinic ray or radiation, and (C) a compound capable of changing in the solubility for an alkali developer by the action of the active species.
Abstract translation: 光敏组合物含有（A）中空或多孔颗粒，（B）能够在用光化学射线或辐射照射时能够产生活性物质的化合物，和（C）能够通过以下方式改变碱显影剂的溶解度的化合物： 活性物种的作用。
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公开(公告)号：US20100194941A1
公开(公告)日：2010-08-05
申请号：US12697899
申请日：2010-02-01
Applicant: Yoshiki MAEHARA , Mitsuji YOSHIBAYASHI
Inventor： Yoshiki MAEHARA , Mitsuji YOSHIBAYASHI
IPC: H04N5/335
CPC classification number: H04N9/045 , H01L27/14618 , H01L27/14621 , H01L27/14627 , H01L27/14683 , H01L2924/0002 , H01L2924/00
Abstract: A semiconductor substrate has an active pixel area comprising a stack of lower electrodes, an intermediate layer of an organic photoelectric conversion material, an upper electrode, a transparent insulating layer and first to third color layers. Disposed outside the active pixel area is a polish stop layer having a high resistance to polishing. In planarizing the first to third color layers, the polishing operation is ended upon reaching the polish stop layer.
Abstract translation: 半导体衬底具有包括下电极堆叠，有机光电转换材料的中间层，上电极，透明绝缘层和第一至第三彩色层的有源像素区域。 设置在有源像素区域之外的是抛光阻止层的抛光停止层。 在平坦化第一至第三颜色层时，抛光操作在到达抛光停止层时结束。
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公开(公告)号：US20080017607A1
公开(公告)日：2008-01-24
申请号：US11779212
申请日：2007-07-17
Applicant: Mitsuji Yoshibayashi
Inventor： Mitsuji Yoshibayashi
IPC: B29D11/00
CPC classification number: G03F7/0007
Abstract: The invention provides a color filter producing method that is based on dry etching and makes it possible to produce a color filter which has fine and rectangular pixels and is excellent in flatness, and color filters produced by the method. The method is a color filter producing method of forming a first colorant-containing layer on a support, removing the first colorant-containing layer corresponding to a region where a second colorant-containing layer is to be formed by dry etching, forming the second colorant-containing layer so as to be embedded into the layer-removed region, removing the first and second colorant-containing layers corresponding to a region where a third colorant-containing layer is to be formed by dry etching, forming the third colorant-containing layer so as to be embedded into the layer-removed region, and removing the colorant-containing layers laminated on other colorant-containing layers.
Abstract translation: 本发明提供了一种基于干蚀刻的滤色器制造方法，并且可以制造具有精细和矩形像素并且平坦度优异的滤色器以及通过该方法制造的滤色器。 该方法是一种在支持体上形成第一含着色剂层的滤色器制造方法，通过干法蚀刻除去与要形成第二含着色剂的层相对应的第一含着色剂层，形成第二着色剂层 以便嵌入去除层的区域中，通过干蚀刻去除与要形成第三含着色剂的层相对应的区域的第一和第二含着色剂的层，形成第三含着色剂的层 以便将其嵌入到去除层的区域中，并除去层叠在其它含着色剂层上的含着色剂层。
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