公开(公告)号：US07794663B2

公开(公告)日：2010-09-14

申请号：US10708251

申请日：2004-02-19

Applicant: Richard E. Pingree, Jr. ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael B. Colson

Inventor： Richard E. Pingree, Jr. ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael B. Colson

IPC: G01N27/00

CPC classification number: G01N27/023

Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

Abstract translation: 在介质中固体材料检测的方法包括在相对于去除了光致抗蚀剂材料的工件的下游接收废气。 电磁电路被构造成包括废气，排出气体被电磁能激发，并且确定电磁电路的阻抗值，其中阻抗值对应于排气内固体物质的量。

公开(公告)号：US20050186680A1

公开(公告)日：2005-08-25

申请号：US10708251

申请日：2004-02-19

Applicant: Richard Pingree ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael Colson

Inventor： Richard Pingree ,  Palanikumara Sakthivel ,  Muhesh Vanodia ,  Michael Colson

IPC: G01N22/00 ,  B01J19/08 ,  G01N27/00 ,  G01N27/02 ,  H01L21/3065

CPC classification number: G01N27/023

Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

Abstract translation: 在介质中固体材料检测的方法包括在相对于去除了光致抗蚀剂材料的工件的下游接收废气。 电磁电路被构造成包括废气，排出气体被电磁能激发，并且确定电磁电路的阻抗值，其中阻抗值对应于排气内固体物质的量。