公开(公告)号：US5962909A

公开(公告)日：1999-10-05

申请号：US711915

申请日：1996-09-12

Applicant: Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

Inventor： Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

IPC: B81B3/00 ,  G01J5/20 ,  H01L29/00 ,  H01L23/48 ,  H01L29/40 ,  H01L31/00

CPC classification number: B81C1/00142 ,  G01J5/20 ,  B81B2203/0315 ,  B81C2201/053

Abstract: The microbridge structure comprises a substrate layer provided with two first electrical contacts, a microstructure provided with two second electrical contacts, and a micro support for suspending the microstructure over and at a predetermined distance from the substrate layer. The micro support extends along a vertical axis. The micro support has a central upper cavity extending along the vertical axis within the micro support. The micro support has a lower end connected to the substrate layer and an upper end connected to the microstructure for supporting the microstructure with respect to the substrate layer. The micro support is a multilayer micro support comprising two conductive paths and a layer made of dielectric material. The conductive paths and the layer of the micro support extend from the upper end to the lower end thereof. The two conductive paths connect respectively the two first contacts to the two second contacts. The present invention is also concerned with a method for forming a microstructure suspended by a micro support.

Abstract translation: 微桥结构包括设置有两个第一电触点的基底层，设置有两个第二电触点的微结构，以及用于将微结构悬置在基底层上方且距离基底层预定距离的微支撑。 微支架沿垂直轴线延伸。 微支架具有在微支架内沿着垂直轴延伸的中心上腔。 微支撑件具有连接到基底层的下端，并且连接到微结构的上端相对于基底层支撑微结构。 微载体是包含两个导电路径和由电介质材料制成的层的多层微载体。 导电路径和微支架的层从其上端延伸到下端。 两个导电路径将两个第一触点分别连接到两个第二触点。 本发明还涉及一种形成由微型载体悬挂的微结构的方法。

公开(公告)号：US5831266A

公开(公告)日：1998-11-03

申请号：US713147

申请日：1996-09-12

Applicant: Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

Inventor： Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

IPC: G01J5/20 ,  H01L31/0232 ,  H01L31/0352

CPC classification number: H01L31/035281 ,  G01J5/20 ,  H01L31/0232 ,  Y02E10/50

Abstract: The microbridge structure is for emitting or detecting radiations. According to one embodiment, it comprises a substrate layer provided with two first electrical contacts, and a microstructure provided with two second electrical contacts and having an underside, a top side opposite to the underside, through which radiations are emitted or received, at least one radiation active layer lying between the underside and the top side, the radiation active layer having two distal points connected respectively to the two second electrical contacts of the microstructure, and a radiation reflective layer lying between the underside and the radiation active layer. It also comprises a micro support for suspending the microstructure over and at a predetermined distance from the substrate layer with the underside of the microstructure facing the substrate layer. The micro support is provided with at least two electrically conductive paths for connecting respectively the two first electrical contacts to two second electrical contacts. The present invention is also concerned with methods for forming microbridge structures.

Abstract translation: 微桥结构用于发射或检测辐射。 根据一个实施例，其包括设置有两个第一电触点的基底层和具有两个第二电触头并具有下侧的微结构，与下侧相对的顶侧，通过该顶面发射或接收辐射，至少一个 位于下侧和顶侧之间的辐射活性层，辐射活性层具有分别连接到微结构的两个第二电触点的两个远端点和位于下侧和辐射活性层之间的辐射反射层。 它还包括微型支撑件，用于将微结构悬置在基板层上方并且距离基板层的预定距离处，微结构的下侧面向基板层。 微型支撑件设置有至少两个导电路径，用于将两个第一电触头分别连接到两个第二电触头。 本发明还涉及形成微桥结构的方法。

公开(公告)号：US6130109A

公开(公告)日：2000-10-10

申请号：US966311

申请日：1997-11-07

Applicant: Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

Inventor： Hubert Jerominek ,  Martin Renaud ,  Nicholas R. Swart

IPC: B81B3/00 ,  G01J5/20 ,  H01L21/00

CPC classification number: B81C1/00142 ,  G01J5/20 ,  B81B2203/0315 ,  B81C2201/053

Abstract: The microbridge structure comprises a substrate layer provided with two first electrical contacts, a microstructure provided with two second electrical contacts, and a micro support for suspending the microstructure over and at a predetermined distance from the substrate layer. The micro support extends along a vertical axis. The micro support has a central upper cavity extending along the vertical axis within the micro support. The micro support has a lower end connected to the substrate layer and an upper end connected to the microstructure for supporting the microstructure with respect to the substrate layer. The micro support is a multilayer micro support comprising two conductive paths and a layer made of dielectric material. The conductive paths and the layer of the micro support extend from the upper end to the lower end thereof. The two conductive paths connect respectively the two first contacts to the two second contacts. The present invention is also concerned with a method for forming a microstructure suspended by a micro support.

Abstract translation: 微桥结构包括设置有两个第一电触点的基底层，设置有两个第二电触点的微结构，以及用于将微结构悬置在基底层上方且距离基底层预定距离的微支撑。 微支架沿垂直轴线延伸。 微支架具有在微支架内沿着垂直轴延伸的中心上腔。 微支撑件具有连接到基底层的下端，并且连接到微结构的上端相对于基底层支撑微结构。 微载体是包含两个导电路径和由电介质材料制成的层的多层微载体。 导电路径和微支架的层从其上端延伸到下端。 两个导电路径将两个第一触点分别连接到两个第二触点。 本发明还涉及一种形成由微型载体悬挂的微结构的方法。

公开(公告)号：US6025951A

公开(公告)日：2000-02-15

申请号：US753697

申请日：1996-11-27

Applicant: Nicholas R. Swart ,  Hubert Jerominek

Inventor： Nicholas R. Swart ,  Hubert Jerominek

IPC: G02B26/08 ,  G03F7/20 ,  H02N1/00 ,  G02F1/03

CPC classification number: G03F7/70291 ,  G02B26/0841 ,  H02N1/006 ,  Y10S359/90

Abstract: The invention relates to spatial light modulators (SLM) for amplitude and phase modulation of incident light. A "flexure" hinge which is provided between the SLM's substrate and micromirror comprises integral hinged sections which allow for the micromirror to tilt or to move in a piston-like fashion relative to the substrate in response to an electrostatic force. The hinge is particularly advantageous for large mirrors. In addition, the hinge can provide improved heat sinking capability over previously reported SLM hinge designs based on torsion bars and cantilever beams. The flexure hinge has sufficient mechanical flexibility that the SLM actuation voltage required is not excessively high. The flexure hinge has many applications, the preferred ones being a SLM for modulating high-energy beams and a SLM for optical channel switching.

Abstract translation: 本发明涉及用于入射光的幅度和相位调制的空间光调制器（SLM）。 设置在SLM的基板和微反射镜之间的“弯曲”铰链包括整体的铰接部分，其允许微镜相对于静电力相对于基板以类似活塞的方式倾斜或移动。 铰链对于大镜子是特别有利的。 此外，铰链可以提供比先前报道的基于扭杆和悬臂梁的SLM铰链设计更好的散热能力。 弯曲铰链具有足够的机械灵活性，使得所需的SLM致动电压不会过高。 挠性铰链具有许多应用，优选的是用于调制高能束的SLM和用于光通道切换的SLM。