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公开(公告)号：US20110163651A1
公开(公告)日：2011-07-07
申请号：US12999255
申请日：2009-06-15
Applicant: Sven Linow , Ralf Pretsch , Thomas Arnold
Inventor： Sven Linow , Ralf Pretsch , Thomas Arnold
CPC classification number: H01J61/025 , H01J61/35
Abstract: A module is provided for irradiation of at least one substrate. The module includes an irradiation unit for irradiating the substrate with ultraviolet light, wherein the irradiation unit has a discharge lamp with an integrated reflector. A method is also provided for producing an irradiation module for irradiating a substrate using UV light, wherein the reflector is coated on the discharge lamp.
Abstract translation: 提供了用于照射至少一个基板的模块。 该模块包括用紫外线照射基板的照射单元，其中该照射单元具有带集成反射器的放电灯。 还提供了一种制造用于使用UV光照射基板的照射模块的方法，其中反射器涂覆在放电灯上。
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公开(公告)号：US08330341B2
公开(公告)日：2012-12-11
申请号：US12999255
申请日：2009-06-15
Applicant: Sven Linow , Ralf Pretsch , Thomas Arnold
Inventor： Sven Linow , Ralf Pretsch , Thomas Arnold
IPC: H01J5/16
CPC classification number: H01J61/025 , H01J61/35
Abstract: A module is provided for irradiation of at least one substrate. The module includes an irradiation unit for irradiating the substrate with ultraviolet light, wherein the irradiation unit has a discharge lamp with an integrated reflector. A method is also provided for producing an irradiation module for irradiating a substrate using UV light, wherein the reflector is coated on the discharge lamp.
Abstract translation: 提供了用于照射至少一个基板的模块。 该模块包括用紫外线照射基板的照射单元，其中该照射单元具有带集成反射器的放电灯。 还提供了一种制造用于使用UV光照射基板的照射模块的方法，其中反射器涂覆在放电灯上。
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