公开(公告)号：US12117406B2

公开(公告)日：2024-10-15

申请号：US17770495

申请日：2020-11-09

Applicant: VG System Limited ,  FEI Company

Inventor： Bryan Barnard ,  Pavel Stejskal

IPC: G01N23/2273

CPC classification number: G01N23/2273 ,  G01N2223/07 ,  G01N2223/501

Abstract: A method and apparatus for detection of charged particles in spectroscopy. Charged particles, received from an energy dispersive spectroscopic analyser as a charged particle beam, are accelerated towards a detector. The accelerated charged particles are received at an array of detecting pixels, the array of detecting pixels forming the detector. The charged particles arriving at the detector have a spread in the energy dispersive direction.

公开(公告)号：US20220381713A1

公开(公告)日：2022-12-01

申请号：US17770495

申请日：2020-11-09

Applicant: VG System Limited ,  FEI Company

Inventor： Bryan Barnard ,  Pavel Stejskal

IPC: G01N23/2273

Abstract: A method and apparatus for detection of charged particles in spectroscopy. Charged particles, received from an energy dispersive spectroscopic analyser as a charged particle beam, are accelerated towards a detector. The accelerated charged particles are received at an array of detecting pixels, the array of detecting pixels forming the detector. The charged particles arriving at the detector have a spread in the energy dispersive direction.