Force sensor
    1.
    发明授权

    公开(公告)号:US10890496B2

    公开(公告)日:2021-01-12

    申请号:US16524735

    申请日:2019-07-29

    Abstract: There is provided a detection ring (600), the structure of which is shown in the perspective view of FIG. 13(a). The detection ring (600) is arranged so that the Z-axis is a central axis on the XY plane as shown in the side view (b), and a planar shape thereof is formed in a circular ring as shown in the bottom view (c). The detection ring (600) is structured so that four sets of detection portions (D1 to D4), each constituted with a blade spring which undergoes elastic deformation, are coupled with four sets of circular arc-shaped coupling portions (L1 to L4). A supporting substrate is arranged below the detection ring (600) and fixing points (P1, P2) arranged on the Y-axis are fixed to the supporting substrate. When force or moment to be detected is exerted on exertion points (Q1, Q2), the four sets of detection portions (D1 to D4) undergo elastic deformation. A displacement electrode is formed on a bottom of a displacement portion (63) at each of the detection portions (D1 to D4), and a fixed electrode is formed on a face facing the supporting substrate to form four sets of capacitive elements, thereby detecting force or moment exerted by operation on the basis of variation amount of capacitance values thereof.

    Force sensor
    2.
    发明授权

    公开(公告)号:US10416030B2

    公开(公告)日:2019-09-17

    申请号:US15312913

    申请日:2015-01-26

    Abstract: There is provided a detection ring (600), the structure of which is shown in the perspective view of FIG. 13(a). The detection ring (600) is arranged so that the Z-axis is a central axis on the XY plane as shown in the side view (b), and a planar shape thereof is formed in a circular ring as shown in the bottom view (c). The detection ring (600) is structured so that four sets of detection portions (D1 to D4), each constituted with a blade spring which undergoes elastic deformation, are coupled with four sets of circular arc-shaped coupling portions (L1 to L4). A supporting substrate is arranged below the detection ring (600) and fixing points (P1, P2) arranged on the Y-axis are fixed to the supporting substrate. When force or moment to be detected is exerted on exertion points (Q1, Q2), the four sets of detection portions (D1 to D4) undergo elastic deformation. A displacement electrode is formed on a bottom of a displacement portion (63) at each of the detection portions (D1 to D4), and a fixed electrode is formed on a face facing the supporting substrate to form four sets of capacitive elements, thereby detecting force or moment exerted by operation on the basis of variation amount of capacitance values thereof.

    FORCE SENSOR
    3.
    发明申请
    FORCE SENSOR 审中-公开

    公开(公告)号:US20190353537A1

    公开(公告)日:2019-11-21

    申请号:US16524735

    申请日:2019-07-29

    Abstract: There is provided a detection ring (600), the structure of which is shown in the perspective view of FIG. 13(a). The detection ring (600) is arranged so that the Z-axis is a central axis on the XY plane as shown in the side view (b), and a planar shape thereof is formed in a circular ring as shown in the bottom view (c). The detection ring (600) is structured so that four sets of detection portions (D1 to D4), each constituted with a blade spring which undergoes elastic deformation, are coupled with four sets of circular arc-shaped coupling portions (L1 to L4). A supporting substrate is arranged below the detection ring (600) and fixing points (P1, P2) arranged on the Y-axis are fixed to the supporting substrate. When force or moment to be detected is exerted on exertion points (Q1, Q2), the four sets of detection portions (D1 to D4) undergo elastic deformation. A displacement electrode is formed on a bottom of a displacement portion (63) at each of the detection portions (D1 to D4), and a fixed electrode is formed on a face facing the supporting substrate to form four sets of capacitive elements, thereby detecting force or moment exerted by operation on the basis of variation amount of capacitance values thereof.

    FORCE SENSOR
    4.
    发明申请
    FORCE SENSOR 审中-公开

    公开(公告)号:US20170191882A1

    公开(公告)日:2017-07-06

    申请号:US15312913

    申请日:2015-01-26

    CPC classification number: G01L1/04 G01L1/144 G01L1/146 G01L5/165 G01L5/226

    Abstract: There is provided a detection ring (600), the structure of which is shown in the perspective view of FIG. 13(a). The detection ring (600) is arranged so that the Z-axis is a central axis on the XY plane as shown in the side view (b), and a planar shape thereof is formed in a circular ring as shown in the bottom view (c). The detection ring (600) is structured so that four sets of detection portions (D1 to D4), each constituted with a blade spring which undergoes elastic deformation, are coupled with four sets of circular arc-shaped coupling portions (L1 to L4). A supporting substrate is arranged below the detection ring (600) and fixing points (P1, P2) arranged on the Y-axis are fixed to the supporting substrate. When force or moment to be detected is exerted on exertion points (Q1, Q2), the four sets of detection portions (D1 to D4) undergo elastic deformation. A displacement electrode is formed on a bottom of a displacement portion (63) at each of the detection portions (D1 to D4), and a fixed electrode is formed on a face facing the supporting substrate to form four sets of capacitive elements, thereby detecting force or moment exerted by operation on the basis of variation amount of capacitance values thereof.

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