公开(公告)号：US06815947B2

公开(公告)日：2004-11-09

申请号：US10459711

申请日：2003-06-12

Applicant: David Scheiner ,  Yoav Many ,  Rahamin Guliamov ,  Shahar Gov

Inventor： David Scheiner ,  Yoav Many ,  Rahamin Guliamov ,  Shahar Gov

IPC: G01B710

CPC classification number: G01B7/105

Abstract: A method and system are presented for measuring in an electrically conductive film of a specific sample including data indicative of a free space response of an RF sensing coil unit to AC voltage applied to the RF sensing coil. The sensing coil is located proximate to the sample at a distance h substantially not exceeding 0.2 r wherein r is the coil radius; an AC voltage in a range from 100 MHz to a few GHz is applied to the sensing coil to cause generation of an eddy current passage through the conductive film; a response of the sensing coil to an effect of the electric current through the conductive film onto a magnetic field of the coil is detected and the measured data indicative of the response is generated. The thickness of the film is determined by utilizing the data indicative of the free space measurements to analyze the measured date. The method thus provides for measuring in conductive films with a sheet resistance Rs in a range from about 0.009 to about 2 Ohm/m2.

Abstract translation: 提供了一种用于在特定样品的导电膜中测量的方法和系统，包括指示RF感测线圈单元的自由空间响应与施加到RF感测线圈的AC电压的数据。 感测线圈以基本上不超过0.2r的距离h定位在样本附近，其中r是线圈半径; 在感测线圈上施加从100MHz到几GHz范围内的AC电压，以产生通过导电膜的涡流通路; 检测到感测线圈对通过导电膜的电流对线圈的磁场的影响的响应，并且生成表示响应的测量数据。 通过利用表示自由空间测量的数据来分析测量日期来确定膜的厚度。 因此，该方法提供了在约0.009至约2Ohm / m 2的范围内的薄层电阻Rs的导电膜中的测量。