公开(公告)号：US20180051372A1

公开(公告)日：2018-02-22

申请号：US15559127

申请日：2016-05-17

Applicant: ADEKA CORPORATION

Inventor： Tomoharu YOSHINO ,  Masaki ENZU ,  Akihiro NISHIDA ,  Nana SUGIURA

IPC: C23C16/18 ,  C07F15/04 ,  C07F15/06 ,  C07F13/00

CPC classification number: C23C16/18 ,  C07F13/00 ,  C07F13/005 ,  C07F15/04 ,  C07F15/045 ,  C07F15/06 ,  C07F15/065 ,  C23C16/4481 ,  C23C16/45553 ,  H01L21/285

Abstract: A novel compound represented by the general formula (I) or (II) below: [in the formula, each of R1 and R2 independently represent a C1˜12 hydrocarbon group, and Si(R3)3 is optionally substituted for a hydrogen atom in the hydrocarbon group; however, R1 and R2 are different groups; R3 represents a methyl or ethyl group; M represents a metal atom or silicon atom; and n is an integer from 1 to 4].

公开(公告)号：US20180037540A1

公开(公告)日：2018-02-08

申请号：US15555215

申请日：2016-02-12

Applicant: ADEKA CORPORATION

Inventor： Tomoharu YOSHINO ,  Masaki ENZU ,  Akihiro NISHIDA ,  Nana SUGIURA ,  Atsushi SAKURAI ,  Makoto OKABE

IPC: C07C251/08 ,  C23C16/455 ,  C23C16/18

CPC classification number: C07C251/08 ,  C07F15/065 ,  C23C16/18 ,  C23C16/45553 ,  C23C16/45555

Abstract: A diazadienyl compound represented by General Formula (I) below: wherein R1 and R2 each independently represent a C1-6 linear or branched alkyl group, R3 represents hydrogen, or a C1-6 linear or branched alkyl group, M represents a metal atom or a silicon atom, and n represents a valence of the metal atom or silicon atom represented by M.