SPECTRAL CONFOCAL MEASUREMENT DEVICE AND MEASUREMENT METHOD THEREOF

    公开(公告)号:US20230087237A1

    公开(公告)日:2023-03-23

    申请号:US17753395

    申请日:2020-06-11

    Abstract: A spectral confocal measurement device includes a light source portion, configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path; an optical sampling portion, configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result. The device can improve measurement accuracy and reduce production costs. In addition, a spectral confocal measurement method is also provided.

    Spectral confocal measurement device and measurement method thereof

    公开(公告)号:US12085501B2

    公开(公告)日:2024-09-10

    申请号:US17753395

    申请日:2020-06-11

    CPC classification number: G01N21/31 G01N2201/0633 G01N2201/0635

    Abstract: A spectral confocal measurement device includes a light source portion, configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path; an optical sampling portion, configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result. The device can improve measurement accuracy and reduce production costs. In addition, a spectral confocal measurement method is also provided.

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