公开(公告)号：US20220299367A1

公开(公告)日：2022-09-22

申请号：US17619608

申请日：2020-07-15

Applicant: AMS INTERNATIONAL AG

Inventor： Ruitao ZHENG ,  James Archibald

IPC: G01J3/28 ,  G01J3/12 ,  G01J3/51

Abstract: A spectrometer device includes: a substrate including multiple light detector elements; a first filter layer on the substrate, in which the first filter layer includes multiple groups of filter stacks, each filter stack in the first filter layer including multiple dielectric films of alternating refractive index; and a second filter layer on the first filter layer, in which the second filter layer includes multiple groups of filter stacks, each filter stack in the second filter layer including multiple dielectric films of alternating refractive index, in which each filter stack in the second filter layer is aligned with both a corresponding filter stack in the first filter layer and a corresponding light detector element to define a respective photodetector channel, and in which each photodetector channel includes a different optical transmission spectrum.