公开(公告)号：US20160035547A1

公开(公告)日：2016-02-04

申请号：US14725527

申请日：2015-05-29

Applicant: APPLIED MATERIALS, INC.

Inventor： WILLIAM JOHANSON ,  BRIJ DATTA ,  FUHONG ZHANG ,  ADOLPH MILLER ALLEN ,  YU Y. LIU ,  PRASHANTH KOTHNUR

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3405 ,  C23C14/35 ,  H01J37/3452 ,  H01J37/3455 ,  H01J37/3461

Abstract: Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.

Abstract translation: 本文提供了磁控管组件的方法和装置。 在一些实施例中，磁控管组件包括具有中心轴线并可围绕中心轴线旋转的分流板，耦合到分流板的第一表面并沿分流板的周边边缘设置360度的闭环磁极，以及 耦合在分流板的第一表面处的开环磁极，其中开环磁极包括围绕中心轴设置的两排磁体。