PROCESS FOR PRODUCING LAMINATE, AND LAMINATE
    3.
    发明申请
    PROCESS FOR PRODUCING LAMINATE, AND LAMINATE 有权
    生产层压板和层压板的方法

    公开(公告)号:US20140363685A1

    公开(公告)日:2014-12-11

    申请号:US14471309

    申请日:2014-08-28

    Abstract: To provide a production process to produce a laminate having excellent moisture resistance and abrasion resistance, and a laminate.The process for producing a laminate 1 comprises a first step of forming a dielectric layer 121, a metal layer 122 and a dielectric layer 121 in this order on a transparent substrate, and a second step of, after the first step, forming a tin zinc oxide layer 13 containing an oxide of tin and zinc as the main component. Formation of the tin zinc oxide layer 13 in the second step is carried out by sputtering using a metal target containing tin and zinc as the main component in a gas atmosphere in which a gas containing carbon atoms substantially functions as an oxidizing gas. Formation of the dielectric layer 121 in the first step is carried out in a gas atmosphere in which a gas containing no carbon atom substantially functions as an oxidizing gas.

    Abstract translation: 为了提供制造具有优异的耐湿性和耐磨性的层压体的制造方法和层压体。 层叠体1的制造方法包括在透明基板上依次形成电介质层121,金属层122和电介质层121的第一工序,在第一工序之后,形成锡锌 含有锡和锌的氧化物作为主要成分的氧化物层13。 第二工序中的锡氧化锌层13的形成通过使用含有锡和锌作为主要成分的金属靶在溅射中进行,其中气体气氛中含有碳原子的气体基本上起氧化气体的作用。 第一工序中的电介质层121的形成是在不含碳原子的气体充分发挥作为氧化气体的气体气氛中进行的。

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