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公开(公告)号：US20230359118A1
公开(公告)日：2023-11-09
申请号：US17912202
申请日：2021-03-16
Applicant: ASML HOLDING N.V.
Inventor： Sotrios LYRINTZIS , Keane Michael LEVY
CPC classification number: G03F7/0035 , G03F7/2037
Abstract: Systems and methods for forming structures (e.g., a plurality of support peaks) on a surface are described. Forming structures on a surface includes masking one or more portions of the surface; removing material from one or more unmasked portions of the surface; and iteratively repeating the masking and removing to reshape the unmasked portions of the surface until the plurality of structures (e.g., support peaks) are formed such that regions of the surface between individual structures (support peaks) have a target characteristic such as a target topography, roughness, etc.
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