公开(公告)号：US20220155675A1

公开(公告)日：2022-05-19

申请号：US17433038

申请日：2020-02-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Ilya MALAKHOVSKY ,  Derk Servatius Gertruda BROUNS ,  Joffrey Rene Sylvian CRAQUELIN ,  Edward HAGE ,  Pieter Renaat Maria HENNUS ,  Jan Willem Adriaan OOSTERLING ,  Ludolf POSTMA ,  Marcel Duco SNEL ,  Johannes Charles Adrianus VAN DEN BERG ,  Wouter VAN DER CHIJS ,  Bartel Joris VAN DER VEEK ,  Mike Johannes Antonius VAN KUIJK ,  Marina Antoinetta Leonarda VAN UUM-VAN HERK ,  Henricus Marinus Theodorus WIERSMA

IPC: G03F1/64 ,  G03F7/20 ,  G03F1/24

Abstract: An object handling apparatus for handling a generally planar object, the object handling apparatus including: two support arms, at least one of the two support arms movable relative to another support arm generally in a plane such that the two support arms are operable to grip and hold an object disposed in the plane, wherein each of the support arms includes at least one support pad and at least one aligner, the support pads configured to locally contact a surface of the object and apply a force thereto generally perpendicular to the plane so as to support the object and the at least one aligner configured to locally contact a surface of the object and apply a force thereto generally in the plane so as to grip the object.

公开(公告)号：US20180107107A1

公开(公告)日：2018-04-19

申请号：US15567279

申请日：2016-03-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Gijs KRAMER ,  Simon Karel RAVENSBERGEN ,  Niek Jacobus Johannes ROSET ,  Pieter Renaat Maria HENNUS

IPC: G03B27/42 ,  G03F7/20

CPC classification number: G03B27/42 ,  G03F7/70341 ,  G03F7/70716

Abstract: A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder, The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body includes a projection configured such that it surrounds the object holder and such that, in use, a layer of immersion liquid is retained on the projection and in contact with an object supported on the object holder,