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公开(公告)号：US20200026203A1
公开(公告)日：2020-01-23
申请号：US16531220
申请日：2019-08-05
Applicant: ASML NETHERLANDS B.V.
Inventor： Nicolaas TEN KATE , Raymond Wilhelmus Louis LAFFARRE
IPC: G03F7/20
Abstract: A table for a lithographic apparatus, the table having a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface.
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