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公开(公告)号：US20230236518A1
公开(公告)日：2023-07-27
申请号：US18008283
申请日：2021-06-09
Applicant: ASML Netherlands B.V. , ASML HOLDING N.V.
Inventor： Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN , Koos VAN BERKEL , Marcus Adrianus VAN DE KERKHOF , Roger Franciscus Mattheus Maria HAMELINCK , Shahab SHERVIN , Marinus Augustinus Christiaan VERSCHUREN , Johannes Bernardus Charles ENGELEN , Matthias KRUIZINGA , Tammo UITTERDIJK , Oleksiy Sergiyovich GALAKTIONOV , Kjeld Gertrudus Hendrikus JANSSEN , Johannes Adrianus Cornelis Maria PIJNENBURG , Peter VAN DELFT
IPC: G03F7/00
CPC classification number: G03F7/70825 , G03F7/70708
Abstract: An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and a circumferential barrier for reducing outflow of gas escaping from space between the object and the core body.
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2.发明公开公开(公告)号：US20230208269A1
公开(公告)日：2023-06-29
申请号：US17926573
申请日：2021-04-18
Applicant: ASML Netherlands B.V.
Inventor： Gudrun Ghilaine Agnes DE GERSEM , Roger Franciscus Mattheus Maria HAMELINCK , Jeroen VAN DUIVENBODE
CPC classification number: H02K41/031 , G03F7/70758 , H01F6/06
Abstract: The invention provides a magnet assembly for a planar electromagnetic motor, the magnet assembly comprising:—a first plurality of superconductive (SC) coils, inside an outer circumference and arranged in a planar pattern such as a rectangular pattern,—a second plurality of SC coils, arranged along an outer boundary of the planar pattern, a coil of the first plurality of SC coils having a first in-plane shape and a coil of the second plurality of SC coils having a second in-plane shape, different from the first in-plane shape, wherein the second plurality of SC coils is arranged at least partly inside the outer circumference.
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