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公开(公告)号：US20200208265A1
公开(公告)日：2020-07-02
申请号：US16727614
申请日：2019-12-26
Applicant: AZTRONG INC.
Inventor： Chien-Te HSIEH , Kuan-Tsae HUANG , Peng-Yang LEE , Chih-Chung MA , Hwai-Jan WU
IPC: C23C16/455 , H01M4/04
Abstract: A coating apparatus includes a material-supply device configured to supply a precursor and a reactant, a distribution device connected to the material-supply device, and a reactor connected to the distribution device. The distribution device is configured to distribute the precursor and the reactant into the reactor.
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