公开(公告)号：US20020070726A1

公开(公告)日：2002-06-13

申请号：US10066870

申请日：2002-02-04

Applicant: Advantest Corp.

Inventor： Shigeru Sugamori

IPC: G01R001/00

CPC classification number: G01R31/31921 ,  G01R31/3004 ,  G01R31/3191

Abstract: A power source current measurement unit provided in a semiconductor test system for measuring a power source current of a device under test with high speed and accuracy. The power source measurement unit includes a DA (digital-to-analog) converter for generating a source voltage to be supplied to a device under test based on a digital signal received, an operational amplifier for forming a negative feedback loop and supplying the source voltage from the DA converter to a power pin of the device under test thereby supplying a power source current to the power pin through a current measurement resistor whose resistance is known, a voltage amplifier for amplifying a voltage representing the amount of power source current supplied to the device under test, an integration circuit for integrating an output signal of the voltage amplifier for a predetermined integration time, and an AD (analog-to-digital) converter for converting an output signal of the integration circuit after the integration time.

Abstract translation: 一种电源电流测量单元，设置在半导体测试系统中，用于以高速度和精确度测量被测器件的电源电流。 电源测量单元包括：DA（数模转换器），用于根据所接收的数字信号产生要提供给被测器件的电源电压;运算放大器，用于形成负反馈回路并提供源电压 从DA转换器到被测器件的电源引脚，从而通过已知电阻的电流测量电阻将电源电流提供给电源引脚，放大电压放大器，用于放大代表提供给电源的电源电流量 被测器件，用于对预定积分时间积分电压放大器的输出信号的积分电路和用于在积分时间之后转换积分电路的输出信号的AD（模拟 - 数字）转换器。