公开(公告)号：US10076772B2

公开(公告)日：2018-09-18

申请号：US14553023

申请日：2014-11-25

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Hongbin Yu ,  Liang Lou ,  Alex Yuandong Gu

IPC: B06B1/06 ,  H01L41/053 ,  H01L41/09 ,  H01L41/113 ,  G10K9/122

CPC classification number: B06B1/0644 ,  B06B1/0651 ,  G10K9/122 ,  H01L41/053 ,  H01L41/0973 ,  H01L41/1138 ,  Y10T29/42

Abstract: A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.