公开(公告)号：US07440254B2

公开(公告)日：2008-10-21

申请号：US10518737

申请日：2003-06-09

Applicant: Andrew James Gallant

Inventor： Andrew James Gallant

IPC: H01G7/00

CPC classification number: B81B3/0008 ,  B81C2201/115 ,  H01G4/2325 ,  H01G5/18

Abstract: A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is applied to produce a potential difference across the control electrode and the second capacitor plate. This has the effect of varying the capacitance of the capacitor. The facing surface of at least one of the plates is formed in such a way that it has a roughened surface. The degree of roughness is sufficient to prevent the facing surfaces adhering together through stiction.

Abstract translation: 一个微机电可变电容器，其具有间隔开的第一和第二电容器板，以在它们之间形成间隙。 第一板具有两个控制电极和一个有源电极。 当施加电压以产生跨越控制电极和第二电容器板的电位差时，第二板可相对于第一板移动。 这具有改变电容器的电容的效果。 至少一个板的面对表面形成为具有粗糙表面。 粗糙度足以防止面对表面通过粘性粘附在一起。