公开(公告)号：US20030184083A1

公开(公告)日：2003-10-02

申请号：US10107639

申请日：2002-03-26

Applicant: Applied Materials, Inc.

Inventor： Charles B. Linam ,  Kurt J. Buchmann

IPC: F16L055/00

CPC classification number: F16L19/00 ,  F16L2201/30 ,  Y10T137/0452 ,  Y10T137/5907

Abstract: A method and apparatus for preventing leakage from a fitting coupling a first and second fluid supply line to an environment surrounding the fitting is generally provided. In one embodiment, a containment apparatus includes a body having a first, second and third aperture formed therethrough. The body defines interior volume that is adapted to substantially enclose the fitting. The interior volume is adapted to be maintained at a pressure less than the surrounding environment to prevent fluid that may leak from the fitting from being released into the surrounding environment. In another aspect of the invention, a method for preventing fluid leakage from a fitting coupling a first and second conduit from entering an environment surrounding the fitting includes enclosing the fitting in a volume defined between a first shell and a second shell, evacuating the volume, and drawing air into the volume from between the shells.

Abstract translation: 通常提供一种用于防止从将第一和第二流体供应管线连接到配件周围的环境的配件泄漏的方法和装置。 在一个实施例中，容纳装置包括具有通过其形成的第一，第二和第三孔的主体。 主体限定适于基本上包围配件的内部容积。 内部容积适于保持在小于周围环境的压力下，以防止可能从配件泄漏的流体被释放到周围环境中。 在本发明的另一方面，一种用于防止流体从联接第一和第二导管的配件泄漏进入围绕配件的环境的方法包括将配件封闭在第一壳体和第二壳体之间限定的体积中，抽空体积， 并从壳之间吸入空气进入体积。