公开(公告)号：US20210090897A1

公开(公告)日：2021-03-25

申请号：US17005284

申请日：2020-08-27

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Prerna Sonthalia GORADIA

IPC: H01L21/3213 ,  H01L21/768

Abstract: The present disclosure generally relates to methods for selectively etching copper, cobalt, and/or aluminum layers on a substrate semiconductor manufacturing applications. A substrate comprising one or more copper layers, cobalt layers, or aluminum layers is transferred to a processing chamber. The surface of the copper, cobalt, or aluminum layer is oxidized. The oxidized copper, cobalt, or aluminum surface is then exposed to hexafluoroacetylacetonate vapor. The hexafluoroacetylacetonate vapor reacts with the oxidized copper, cobalt, or aluminum surface to form a volatile compound, which is then pumped out of the chamber. The reaction of the oxidized copper, cobalt, or aluminum surface with the hexafluoroacetylacetonate vapor selectively atomic layer etches the copper, cobalt, or aluminum surface.

公开(公告)号：US20220081763A1

公开(公告)日：2022-03-17

申请号：US17477430

申请日：2021-09-16

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Sankalp PATIL ,  Sukti CHATTERJEE ,  David Masayuki ISHIKAWA ,  Prerna Sonthalia GORADIA ,  David Alexander BRITZ ,  Lance A. SCUDDER

IPC: C23C16/40 ,  C23C14/08 ,  C23C16/455 ,  F02C6/12

Abstract: Embodiments of the present disclosure generally relate to protective coatings on turbocharger components, such as turbine wheels and compressor wheels, and other rotary equipment components and methods for depositing the protective coatings on such components. In one or more embodiments, a coated turbocharger component is provided and includes a metallic substrate containing a nickel-based alloy or superalloy, a cobalt-based alloy or superalloy, a stainless steel, or a titanium-aluminum alloy and a protective coating disposed on the metallic substrate. The protective coating contains an aluminum oxide having a purity of greater than 99 atomic percent (at %). In some examples, the metallic substrate is a turbine wheel, a compressor wheel, an impeller, a fan blade, a disk, a heat shield, a pulley, or a shaft.

公开(公告)号：US20210381386A1

公开(公告)日：2021-12-09

申请号：US16897144

申请日：2020-06-09

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Sarin Sundar JAINNAGAR KUPPUSWAMY ,  Prerna Sonthalia GORADIA ,  Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Kenichi OHNO ,  Yuriy MELNIK ,  David Alexander BRITZ ,  Sankalp PATIL ,  Ankur KADAM ,  Abhishek MANDAL

IPC: F01D5/28 ,  C23C16/40 ,  C23C16/06 ,  C23C16/455 ,  C23C14/08 ,  C23C14/14

Abstract: Embodiments of the present disclosure generally relate to oxide layer compositions for turbine engine components and methods for depositing the oxide layer compositions. In one or more embodiments, a turbine engine component includes a superalloy substrate and a bond coat disposed over the superalloy substrate. The turbine engine component includes an oxide layer disposed over the bond coat, where the oxide layer includes aluminum oxide and a metal dopant. The turbine engine component includes a thermal barrier coating disposed over the oxide layer.

公开(公告)号：US20220002883A1

公开(公告)日：2022-01-06

申请号：US17339411

申请日：2021-06-04

Applicant: Applied Materials, Inc.

Inventor： Abhishek MANDAL ,  Nitin DEEPAK ,  Neha GUPTA ,  Prerna Sonthalia GORADIA ,  Ankur KADAM ,  Kenichi OHNO ,  David Alexander BRITZ ,  Lance A. SCUDDER

IPC: C23G1/10 ,  C23C16/02 ,  C23C16/34 ,  C23C16/40 ,  C11D11/00 ,  C11D7/32 ,  C11D7/06 ,  C11D7/08 ,  B64F5/40

Abstract: Embodiments of the present disclosure generally relate to methods for refurbishing aerospace components by removing corrosion and depositing protective coatings. In one or more embodiments, a method of refurbishing an aerospace component includes exposing the aerospace component containing corrosion to an aqueous cleaning solution. The aerospace component contains a nickel superalloy, an aluminide layer disposed on the nickel superalloy, and an aluminum oxide layer disposed on the aluminide layer. The method includes removing the corrosion from a portion of the aluminum oxide layer with the aqueous cleaning solution to reveal the aluminum oxide layer, then exposing the aluminum oxide layer to a post-rinse, and forming a protective coating on the aluminum oxide layer.

公开(公告)号：US20200283897A1

公开(公告)日：2020-09-10

申请号：US16800310

申请日：2020-02-25

Applicant: Applied Materials, Inc.

Inventor： Nitin DEEPAK ,  Suresh Chand SETH ,  Prerna Sonthalia GORADIA ,  Geetika BAJAJ ,  Darshan THAKARE ,  Jennifer Y. SUN ,  Gayatri NATU

IPC: C23C16/455 ,  C23C16/08 ,  C23C16/40 ,  C23C22/34

Abstract: Embodiments described herein provide a method of forming amorphous a fluorinated metal film. The method includes positioning an object in an atomic layer deposition (ALD) chamber having a processing region, depositing a metal-oxide containing layer on an object using an atomic layer deposition (ALD) process, depositing a metal-fluorine layer on the metal-oxide containing layer using an activated fluorination process, and repeating the depositing the metal-oxide containing layer and the depositing the metal-oxide containing layer until a fluorinated metal film with a predetermined film thickness is formed. The activated fluorination process includes introducing a first flow of a fluorine precursor (FP) to the processing region. The FP includes at least one organofluorine reagent or at least one fluorinated gas.