公开(公告)号：US11373891B2

公开(公告)日：2022-06-28

申请号：US16660057

申请日：2019-10-22

Applicant: Applied Materials, Inc.

Inventor： Paul B. Reuter ,  Robin C. Armstrong ,  John C. Menk ,  Nir Merry

IPC: H01L21/673

Abstract: Equipment front end module (EFEM) includes front located return ducts. The EFEM may include a front wall, a rear wall, and two side walls, the front wall including a plurality of load ports, and the rear wall configured to couple to a load lock apparatus. An EFEM chamber is formed between the front wall, the rear wall, and the two side walls. An upper plenum is positioned at a top of the EFEM and includes an opening into the EFEM chamber. Return ducts provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum. At least some of the plurality of return ducts are located between the load ports. Electronic device manufacturing assemblies and methods of operating equipment front end modules are also disclosed.

公开(公告)号：US20220293444A1

公开(公告)日：2022-09-15

申请号：US17829607

申请日：2022-06-01

Applicant: Applied Materials, Inc.

Inventor： Paul B. Reuter ,  Robin C. Armstrong ,  John C. Menk ,  Nir Merry

IPC: H01L21/673

Abstract: An equipment front end module, including: an equipment front end module chamber. An upper plenum at a top of the equipment front end module and including an opening into the equipment front end module chamber. A plurality of return ducts that are coupled between a bottom of the equipment front end module chamber and the upper plenum, the plurality of return ducts providing a return gas flow path enabling recirculation of gas from the equipment front end module chamber to the upper plenum.