公开(公告)号：US20200041407A1

公开(公告)日：2020-02-06

申请号：US16460309

申请日：2019-07-02

Applicant: Applied Materials, Inc.

Inventor： Zubin HUANG ,  Sarah Langlois WHITE ,  Jonathan Robert BAKKE ,  Diwakar N. KEDLAYA ,  Juan Carlos ROCHA ,  Fang RUAN

IPC: G01N21/3504 ,  G01N21/33 ,  H01L21/02 ,  H01L21/67 ,  C23C16/448 ,  C23C16/52

Abstract: Systems and methods used to deliver a processing gas having a desired diborane concentration to a processing volume of a processing chamber are provided herein. In one embodiment a system includes a borane concentration sensor. The borane concentration sensor includes a body and a plurality of windows. Here, individual ones of the plurality of windows are disposed at opposite ends of the body and the body and the plurality of windows collectively define a cell volume. The borane concentration sensor further includes a radiation source disposed outside of the cell volume proximate to a first window of the plurality of windows, and a radiation detector disposed outside the cell volume proximate to a second window of the plurality of windows.