公开(公告)号：US12084771B2

公开(公告)日：2024-09-10

申请号：US17189963

申请日：2021-03-02

Applicant: Applied Materials, Inc.

Inventor： Zohreh Razavi Hesabi ,  Cong Trinh ,  Kevin Griffin ,  Alexander V. Garachtchenko ,  Kenric Choi ,  Vipin Jose ,  Saloni Sawalkar ,  Maribel Maldonado-Garcia ,  Kendrick H. Chaney

IPC: G05D9/12 ,  C23C16/455 ,  C23C16/52 ,  G01F23/00 ,  H01L21/66 ,  H01L21/67

CPC classification number: C23C16/52 ,  C23C16/45544 ,  G01F23/0007 ,  G05D9/12 ,  H01L21/67253 ,  H01L22/10

Abstract: An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.

公开(公告)号：US20240360561A1

公开(公告)日：2024-10-31

申请号：US18765688

申请日：2024-07-08

Applicant: Applied Materials, Inc.

Inventor： Zohreh Razavi Hesabi ,  Cong Trinh ,  Kevin Griffin ,  Alexander V. Garachtchenko ,  Kenric Choi ,  Vipin Jose ,  Saloni Sawalkar ,  Maribel Maldonado-Garcia ,  Kendrick H. Chaney

IPC: C23C16/52 ,  C23C16/455 ,  G01F23/00 ,  G05D9/12 ,  H01L21/66 ,  H01L21/67

CPC classification number: C23C16/52 ,  C23C16/45544 ,  G01F23/0007 ,  G05D9/12 ,  H01L21/67253 ,  H01L22/10

Abstract: An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.

公开(公告)号：US20220282379A1

公开(公告)日：2022-09-08

申请号：US17189963

申请日：2021-03-02

Applicant: Applied Materials, Inc.

Inventor： Zohreh Razavi Hesabi ,  Cong Trinh ,  Kevin Griffin ,  Alexander V. Garachtchenko ,  Kenric Choi ,  Vipin Jose ,  Saloni Sawalkar ,  Maribel Maldonado-Garcia ,  Kendrick H. Chaney

IPC: C23C16/52 ,  C23C16/455 ,  H01L21/67 ,  H01L21/66

Abstract: An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.