公开(公告)号：US20220397744A1

公开(公告)日：2022-12-15

申请号：US17805623

申请日：2022-06-06

Applicant: Applied Materials, Inc.

Inventor： Wubin PANG ,  Yangyang SUN ,  Jinxin FU ,  Samarth BHARGAVA

IPC: G02B13/06 ,  G02B13/16 ,  G02B13/22 ,  G02B27/00

Abstract: Embodiments of the present disclosure generally relate to an optical system having a lens system configured to have a wide field of view and high resolution. The optical system includes three or more lens groups with ability to combat optical aberrations and produce a pupil outside of the lens group. The lens system as an image projection system projects a pattern or image rendered on a flat reticle or display of finite distance to the infinity. In an imaging system, the lens system collects light from infinity and forms an image of that object on a sensor.