公开(公告)号：US20240401197A1

公开(公告)日：2024-12-05

申请号：US18802354

申请日：2024-08-13

Applicant: Applied Materials, Inc.

Inventor： Xiaowei WU ,  Jennifer Y. Sun ,  Michael R. Rice

IPC: C23C16/455 ,  C23C16/30

Abstract: Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing fluoride coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.