公开(公告)号：US20240255770A1

公开(公告)日：2024-08-01

申请号：US18104230

申请日：2023-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Boris GOLBERG ,  Haim FELDMAN ,  Avishai BARTOV ,  Ron NAFTALI

IPC: G02B27/28 ,  G01N21/88 ,  G01N21/95 ,  G02F1/13363

CPC classification number: G02B27/283 ,  G01N21/8806 ,  G01N21/95 ,  G02F1/13363 ,  G02B2207/117

Abstract: A polarizer system is described. The polarizer system comprises at least one polarization beam splitter, a polarization rotator, and a beam combiner. The at least one polarization beam splitter is positioned to receive input radiation beam and to split the input radiation beam directing a first beam portion having a first linear polarization orientation along a first path and a second beam portion having a second linear polarization orientation orthogonal to said first linear polarization orientation along a second path. The polarization rotator is located along said second path and configured to rotate polarization of said beam portion to be parallel to said first linear polarization orientation. The beam combiner is configured and positioned to combine said first and second beam portions to form a common beam having said first linear polarization orientation propagating along a selected optical path.