公开(公告)号：US20240057957A1

公开(公告)日：2024-02-22

申请号：US18110328

申请日：2023-02-15

Applicant: Applied Materials Israel Ltd.

Inventor： Martin Chauvin ,  Eugene Brozgol ,  Marat Feldman ,  Yosef Basson ,  Itay Asulin ,  Shmuel Nakash ,  Jacob Levin

IPC: A61B6/00

CPC classification number: A61B6/482 ,  A61B6/40 ,  A61B6/52

Abstract: An energy-dispersive x-ray spectroscopy (EDX) sensing unit, the EDX sensing unit include a protective unit and an x-ray sensor that includes one or more sensing regions. The protective unit is configured to (i) introduce a change in one or more properties of electrons emitted from a sample, thereby preventing the electrons emitted from the sample from reaching the one or more sensing regions, the electrons are emitted from the sample due to an illuminating of the sample by a primary electron beam, and (ii) increase a safety of operation of the EDX sensing unit. The x-ray sensor is configured to (i) receive, by the one or more sensing regions, x-ray photons emitted from the sample due to the illuminating of the sample, and (ii) generate detection signals indicative of the x-ray photons.