公开(公告)号：US20250055241A1

公开(公告)日：2025-02-13

申请号：US18231221

申请日：2023-08-07

Applicant: Applied Materials Israel Ltd.

Inventor： Ron NAFTALI ,  Haim FELDMAN ,  Boris GOLBERG ,  Ram ORON

IPC: H01S3/00

Abstract: A pulse stretcher unit, and a respecting inspection system are disclosed. The pulse stretcher unit comprises a selected number of beam splitters arranged along a selected main path and comprising an input beam splitter, an output beam splitter and one or more intermediate beam splitters, and an arrangement of light reflecting surfaces defining a selected number of n auxiliary paths extending between said selected number of beam splitters. Wherein said selected number of beam splitters direct input beam between said selected main path and said selected number of auxiliary paths for splitting an input pulse into a series of pulses having generally equal amplitude. And wherein lengths of said auxiliary paths follow approximately a series of the form L/2k for k=0, 1, 2, where L is a selected length of an auxiliary path.