公开(公告)号：US4718974A

公开(公告)日：1988-01-12

申请号：US1645

申请日：1987-01-09

Applicant: Behrooz Minaee

Inventor： Behrooz Minaee

IPC: B01J19/12 ,  G03F7/42 ,  B44C1/22 ,  B29C37/00 ,  C03C15/00 ,  C03C25/06

CPC classification number: G03F7/42 ,  B01J19/124

Abstract: Apparatus and method for removing organic polymers, such as photoresist, from the surface of an object, such as a semiconductor wafer. The apparatus comprises a microwave energy source and a reaction chamber housing an ultraviolet lamp and a platform for holding a semiconductor wafer. A portion of the chamber's exterior, between the ultraviolet lamp and the microwave energy source, is permeable to microwaves. The reaction chamber has an inlet and an outlet for passing a reaction gas through the reaction chamber. The platform is situated so that the full surface of a semiconductor wafer thereon is exposed to light emitted by the ultrtaviolet lamp which responds to microwave stimulation from the microwave energy source by emitting ultraviolet radiation having a preselected wavelength between 100 and 300 angstroms. Photoresist can be stripped from a semiconductor wafer on the platform by energizing the ultraviolet lamp while passing a reaction gas through the reaction chamber and thereby ablating organic polymers and impurities from the surface of the semiconductor wafer.

Abstract translation: 从诸如半导体晶片的物体的表面去除有机聚合物如光致抗蚀剂的装置和方法。 该装置包括微波能源和容纳紫外灯的反应室和用于保持半导体晶片的平台。 在紫外灯和微波能量源之间的腔室外部的一部分是微波可渗透的。 反应室具有用于使反应气体通过反应室的入口和出口。 平台的位置使得其上的半导体晶片的整个表面暴露于由紫外线灯发射的光，其通过发射具有100至300埃之间的预选波长的紫外线辐射来响应来自微波能量源的微波刺激。 通过在使反应气体通过反应室的同时激发紫外线灯，从而从半导体晶片的表面烧蚀有机聚合物和杂质，可以从平台上的半导体晶片剥离光致抗蚀剂。

公开(公告)号：US4687895A

公开(公告)日：1987-08-18

申请号：US636029

申请日：1984-07-30

Applicant: Sanjeev R. Chitre ,  Behrooz Minaee

Inventor： Sanjeev R. Chitre ,  Behrooz Minaee

IPC: G03F7/00 ,  F26B15/18 ,  H01L21/30 ,  H05B6/78

CPC classification number: H05B6/78 ,  H05B6/806 ,  Y10S99/14

Abstract: A system for heating objects serially within a plurality of separate heating zones is described. Objects are placed on pallets and sequentially moved through the plurality of heating zones. In a preferred embodiment, the pallets are fabricated of a microwave absorptive material and sequentially moved through a plurality of microwave cavities. The microwave cavities are provided with a source of microwave energy which heats the pallets, and by conduction, the objects placed thereon.

Abstract translation: 描述了用于在多个分开的加热区内串联加热物体的系统。 将物体放置在托盘上并顺序移动通过多个加热区。 在优选实施例中，托盘由微波吸收材料制成并顺序移动通过多个微波腔。 微波腔设置有微波能量源，其加热托盘并通过传导放置在其上的物体。