公开(公告)号：US20210229934A1

公开(公告)日：2021-07-29

申请号：US17156007

申请日：2021-01-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel BABBS ,  Vincent W. TSANG ,  Robert C. MAY

IPC: B65G47/90 ,  H01L21/687 ,  H01L21/67

Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.