公开(公告)号：US20210291357A1

公开(公告)日：2021-09-23

申请号：US17335479

申请日：2021-06-01

Applicant: Brooks Automation, Inc.

Inventor： Sean E. PLAISTED ,  Leigh F. SHARROCK ,  Chris AITKEN

IPC: B25J9/04 ,  B25J9/06 ,  B25J9/10 ,  H01L21/683 ,  B25J17/02 ,  B25J15/00 ,  H01L21/687 ,  B25J9/16 ,  H01L21/677 ,  H01L21/67

Abstract: A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.

公开(公告)号：US20190105770A1

公开(公告)日：2019-04-11

申请号：US16151598

申请日：2018-10-04

Applicant: Brooks Automation, Inc.

Inventor： Sean E. PLAISTED ,  Leigh F. SHARROCK ,  Chris AITKEN

IPC: B25J9/04 ,  B25J9/06 ,  B25J9/10 ,  B25J9/16 ,  B25J17/02 ,  B25J15/00 ,  H01L21/687 ,  H01L21/683

Abstract: A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.