公开(公告)号：US20210305076A1

公开(公告)日：2021-09-30

申请号：US17229495

申请日：2021-04-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing YIN ,  Jairo MOURA ,  Vincent TSANG ,  Aaron GAWLIK ,  Nathan SPIKER

IPC: H01L21/68 ,  H01L21/687

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

公开(公告)号：US20190019719A1

公开(公告)日：2019-01-17

申请号：US16029320

申请日：2018-07-06

Applicant: Brooks Automation, inc.

Inventor： Dana L ATWOOD ,  Jairo MOURA

IPC: H01L21/687 ,  H01L21/677 ,  G05B19/042 ,  G05B19/421

Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

公开(公告)号：US20210225685A1

公开(公告)日：2021-07-22

申请号：US17158523

申请日：2021-01-26

Applicant: Brooks Automation, Inc.

Inventor： Dana L. ATWOOD ,  Jairo MOURA

IPC: H01L21/687 ,  H01L21/677 ,  G05B19/421 ,  H01L21/67 ,  B25J9/16

Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

公开(公告)号：US20200321232A1

公开(公告)日：2020-10-08

申请号：US16825663

申请日：2020-03-20

Applicant: Brooks Automation, Inc.

Inventor： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo MOURA

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.