公开(公告)号：US3798511A

公开(公告)日：1974-03-19

申请号：US33890773

申请日：1973-03-07

Applicant: CALIFORNIA INST OF TECHN

Inventor： NOTARYS H ,  MERCEREAU J

IPC: H01L39/22 ,  H01L39/24 ,  H01L3/00 ,  H01L5/02

CPC classification number: H01L39/223 ,  H01L39/2493 ,  Y10S505/874

Abstract: Techniques are disclosed for fabrication of superconducting thin film structures which show Josephson-like effects and which allow fabrication of standard components, such as resistors and capacitors in circuits, starting with the deposition of superimposed thin films of selected metals at least one of which is superconducting, and all of which are stable (i.e., will not diffuse and are sufficiently inert to be chemically stable under normal use). The thin films are all effectively removed around the desired structure by anodization through a photoresist mask or by ion beam etching. A structure which shows a Josephson-like effect is produced by so manipulating the thin films that a thin line region across a narrowed section of the layered thin films is produced with a lower transition temperature than in the surrounding layered films. This is done by altering the ratio of the thickness of the superconductive thin film to the thickness of the non-superconductive thin film in the thin line region and controlling the dimension, l, of the thin line region in the direction of current flow.

Abstract translation: 公开了用于制造超导薄膜结构的技术，其显示出约瑟夫逊效应，并且允许制造诸如电路中的电阻器和电容器的标准组件，首先沉积选定金属的叠加薄膜，其中至少一个是超导 ，并且所有这些都是稳定的（即，在正常使用下不会扩散并且足够惰性以使其具有化学稳定性）。 通过通过光致抗蚀剂掩模的阳极氧化或通过离子束蚀刻，薄膜全部被有效地除去所需结构。 通过这样操作薄膜，可以制造出具有约瑟夫森效应的结构，即薄层的薄壁区域跨越层状薄膜的窄区域产生的转变温度低于周围分层薄膜。 这是通过改变超导薄膜的厚度与细线区域中的非超导薄膜的厚度的比例来实现的，并且控制细线区域在电流方向上的尺寸l。