公开(公告)号：US11340256B2

公开(公告)日：2022-05-24

申请号：US16319620

申请日：2018-01-31

Applicant: CAMECA INSTRUMENTS INC.

Inventor： Joseph Hale Bunton ,  Daniel Robert Lenz ,  Dana Jeffrey Shepard

IPC: H01J37/285 ,  G01Q60/30 ,  G01N27/626 ,  G01N27/66 ,  G01Q60/38

Abstract: An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.