公开(公告)号：US09810640B2

公开(公告)日：2017-11-07

申请号：US15006976

申请日：2016-01-26

Applicant: CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.

Inventor： Chao-Yi Yeh ,  Pin-Chuan Su ,  Shang-Iun Yang ,  Chih Yuan Liu

IPC: G01N21/00 ,  G01N21/89 ,  G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8914 ,  G01N21/8806 ,  G01N2021/8841 ,  G01N2021/9513 ,  G01N2201/103

Abstract: A panel inspection apparatus is provided. The panel inspection apparatus has a support platform, a delivery platform and a panel inspection assembly. The delivery platform is disposed on the support platform, and the delivery platform has a push module for delivering the panel. The panel inspection assembly includes a plurality of light source modules and a plurality of image-taking modules corresponding to the light source modules. The light source modules include a front light source, a first horizontal light source, and a back light source. The image-taking modules include a front light image-taking module, a first horizontal light image-taking module, and a back light image-taking module. The push module delivers the panel across the support platform so that a plurality of light beams emitted from the light source modules can scan the panel to finish the panel inspection process.