公开(公告)号：US20120212826A1

公开(公告)日：2012-08-23

申请号：US13403087

申请日：2012-02-23

Applicant: CHRISTIAN HENN ,  THORSTEN DAMM

Inventor： CHRISTIAN HENN ,  THORSTEN DAMM

IPC: G02B1/10 ,  C23C14/35

CPC classification number: G02B1/116 ,  C03C17/3435 ,  C03C2217/734 ,  C03C2217/77 ,  C23C14/08 ,  C23C14/185 ,  C23C14/3485 ,  C23C14/35 ,  G02B1/115 ,  H01J37/3467

Abstract: A substrate is provided with an abrasion resistance antireflection coating. The coated substrate includes a multilayer antireflection coating on at least one side. The coating has layers with different refractive indices, wherein higher refractive index layers alternate with lower refractive index layers. The layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum, with a ratio of the amounts of aluminum to silicon is greater than 0.05, preferably greater than 0.08, but with the amount of silicon predominant relative to the amount of aluminum. The layers having a higher refractive index include a silicide, an oxide, or a nitride.

Abstract translation: 衬底上设有耐磨抗反射涂层。 涂覆的基底在至少一侧包括多层抗反射涂层。 涂层具有不同折射率的层，其中较高折射率层与较低折射率层交替。 具有较低折射率的层由具有一定比例的铝的氧化硅形成，铝与硅的量的比率大于0.05，优选大于0.08，但是相对于 铝。 具有较高折射率的层包括硅化物，氧化物或氮化物。