THREE-DIMENSIONAL MEASUREMENT APPARATUS AND THREE-DIMENSIONAL MEASUREMENT METHOD

    公开(公告)号:US20220071073A1

    公开(公告)日:2022-03-03

    申请号:US17523266

    申请日:2021-11-10

    Abstract: A three-dimensional measurement apparatus measures measurement targets placed in a target measurement area on a measurement object. The apparatus includes: a measurement module that: is positioned with respect to the target measurement area, and includes: a first irradiator that irradiates the target measurement area with predetermined light for height measurement; a second irradiator that irradiates the target measurement area with predetermined patterned light for three-dimensional measurement; and an imaging device that takes an image of the target measurement area; and a control device that moves the measurement module in a height direction and successively positions the measurement module at a predetermined height position determined by mapping, and performs, based on image data taken by irradiating the target measurement area with predetermined patterned light, three-dimensional measurement to the measurement targets at the predetermined height position.

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